Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058271036> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2058271036 endingPage "065501" @default.
- W2058271036 startingPage "065501" @default.
- W2058271036 abstract "The internal stress and microstructure of ZnO films were investigated as a function of carbon dioxide (CO 2 ) gas flow ratio [CO 2 /(O 2 +CO 2 )] during sputter deposition. The internal stress of the ZnO films decreased with increasing CO 2 gas flow ratio. The carbon concentration in the films deposited using CO 2 gas increased by up to 4.0 at. %. Furthermore, the ZnO films deposited without CO 2 gas exhibited a preferred orientation of (002); however, the C-doped ZnO films exhibited random orientations. These findings suggest that the C atoms incorporated in the ZnO crystal lattice induce this random orientation, thereby relaxing the internal stress of C-doped ZnO films." @default.
- W2058271036 created "2016-06-24" @default.
- W2058271036 creator A5006404966 @default.
- W2058271036 creator A5034606778 @default.
- W2058271036 creator A5060956511 @default.
- W2058271036 creator A5080906476 @default.
- W2058271036 date "2010-06-01" @default.
- W2058271036 modified "2023-09-26" @default.
- W2058271036 title "Internal Stress and Microstructure of Zinc Oxide Films Sputter-Deposited with Carbon Dioxide Gas" @default.
- W2058271036 cites W1966417765 @default.
- W2058271036 cites W1978291627 @default.
- W2058271036 cites W1984014126 @default.
- W2058271036 cites W2002952377 @default.
- W2058271036 cites W2019573328 @default.
- W2058271036 cites W2029655271 @default.
- W2058271036 cites W2039804447 @default.
- W2058271036 cites W2045789576 @default.
- W2058271036 cites W2052785308 @default.
- W2058271036 cites W2063395327 @default.
- W2058271036 cites W2066874036 @default.
- W2058271036 cites W2067545621 @default.
- W2058271036 cites W2084745023 @default.
- W2058271036 cites W2091071485 @default.
- W2058271036 cites W2096701800 @default.
- W2058271036 cites W2104002694 @default.
- W2058271036 doi "https://doi.org/10.1143/jjap.49.065501" @default.
- W2058271036 hasPublicationYear "2010" @default.
- W2058271036 type Work @default.
- W2058271036 sameAs 2058271036 @default.
- W2058271036 citedByCount "4" @default.
- W2058271036 countsByYear W20582710362015 @default.
- W2058271036 crossrefType "journal-article" @default.
- W2058271036 hasAuthorship W2058271036A5006404966 @default.
- W2058271036 hasAuthorship W2058271036A5034606778 @default.
- W2058271036 hasAuthorship W2058271036A5060956511 @default.
- W2058271036 hasAuthorship W2058271036A5080906476 @default.
- W2058271036 hasConcept C127413603 @default.
- W2058271036 hasConcept C138885662 @default.
- W2058271036 hasConcept C159985019 @default.
- W2058271036 hasConcept C171250308 @default.
- W2058271036 hasConcept C178790620 @default.
- W2058271036 hasConcept C185592680 @default.
- W2058271036 hasConcept C19067145 @default.
- W2058271036 hasConcept C191897082 @default.
- W2058271036 hasConcept C192562407 @default.
- W2058271036 hasConcept C21036866 @default.
- W2058271036 hasConcept C22423302 @default.
- W2058271036 hasConcept C2988361403 @default.
- W2058271036 hasConcept C41895202 @default.
- W2058271036 hasConcept C42360764 @default.
- W2058271036 hasConcept C49040817 @default.
- W2058271036 hasConcept C530467964 @default.
- W2058271036 hasConcept C535196362 @default.
- W2058271036 hasConcept C57863236 @default.
- W2058271036 hasConcept C61427134 @default.
- W2058271036 hasConcept C87976508 @default.
- W2058271036 hasConceptScore W2058271036C127413603 @default.
- W2058271036 hasConceptScore W2058271036C138885662 @default.
- W2058271036 hasConceptScore W2058271036C159985019 @default.
- W2058271036 hasConceptScore W2058271036C171250308 @default.
- W2058271036 hasConceptScore W2058271036C178790620 @default.
- W2058271036 hasConceptScore W2058271036C185592680 @default.
- W2058271036 hasConceptScore W2058271036C19067145 @default.
- W2058271036 hasConceptScore W2058271036C191897082 @default.
- W2058271036 hasConceptScore W2058271036C192562407 @default.
- W2058271036 hasConceptScore W2058271036C21036866 @default.
- W2058271036 hasConceptScore W2058271036C22423302 @default.
- W2058271036 hasConceptScore W2058271036C2988361403 @default.
- W2058271036 hasConceptScore W2058271036C41895202 @default.
- W2058271036 hasConceptScore W2058271036C42360764 @default.
- W2058271036 hasConceptScore W2058271036C49040817 @default.
- W2058271036 hasConceptScore W2058271036C530467964 @default.
- W2058271036 hasConceptScore W2058271036C535196362 @default.
- W2058271036 hasConceptScore W2058271036C57863236 @default.
- W2058271036 hasConceptScore W2058271036C61427134 @default.
- W2058271036 hasConceptScore W2058271036C87976508 @default.
- W2058271036 hasIssue "6R" @default.
- W2058271036 hasLocation W20582710361 @default.
- W2058271036 hasOpenAccess W2058271036 @default.
- W2058271036 hasPrimaryLocation W20582710361 @default.
- W2058271036 hasRelatedWork W1993938466 @default.
- W2058271036 hasRelatedWork W2046292958 @default.
- W2058271036 hasRelatedWork W2052710927 @default.
- W2058271036 hasRelatedWork W2053816391 @default.
- W2058271036 hasRelatedWork W2062982660 @default.
- W2058271036 hasRelatedWork W2110957880 @default.
- W2058271036 hasRelatedWork W2316948141 @default.
- W2058271036 hasRelatedWork W2351679394 @default.
- W2058271036 hasRelatedWork W2560488904 @default.
- W2058271036 hasRelatedWork W184222697 @default.
- W2058271036 hasVolume "49" @default.
- W2058271036 isParatext "false" @default.
- W2058271036 isRetracted "false" @default.
- W2058271036 magId "2058271036" @default.
- W2058271036 workType "article" @default.