Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058271503> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2058271503 endingPage "1188" @default.
- W2058271503 startingPage "1186" @default.
- W2058271503 abstract "Effect of rapid thermal annealing (RTA) at 800, 1000, and 1200 °C on the Ni/Si3N4/Si system has been studied employing electron microscopy, Auger electron spectroscopy, and x-ray diffraction analysis. Formation of NiSi or NiSi2 silicides on the Ni/Si3N4 interface and of NiSi2 silicide on the Si3N4/Si interface was observed after RTA. This was a result of the diffusion of Si into deposited 250-nm-thick Ni layer and the diffusion of Ni through 140-nm-thick amorphous Si3N4 layer into the Si substrate. The diffusion coefficient of Ni in amorphous Si3N4 was estimated to be D≂103 exp(−3.2 eV/kT), cm2/s." @default.
- W2058271503 created "2016-06-24" @default.
- W2058271503 creator A5002497359 @default.
- W2058271503 creator A5025700709 @default.
- W2058271503 creator A5035462800 @default.
- W2058271503 creator A5076111342 @default.
- W2058271503 date "1988-09-26" @default.
- W2058271503 modified "2023-09-27" @default.
- W2058271503 title "Formation of nickel silicides in the Ni/Si3N4/Si system during rapid thermal annealing" @default.
- W2058271503 cites W1642975104 @default.
- W2058271503 cites W2003563627 @default.
- W2058271503 cites W2004752900 @default.
- W2058271503 cites W2008466651 @default.
- W2058271503 cites W2014000617 @default.
- W2058271503 cites W2020388814 @default.
- W2058271503 cites W2042894806 @default.
- W2058271503 cites W2086720945 @default.
- W2058271503 cites W2094563897 @default.
- W2058271503 doi "https://doi.org/10.1063/1.100665" @default.
- W2058271503 hasPublicationYear "1988" @default.
- W2058271503 type Work @default.
- W2058271503 sameAs 2058271503 @default.
- W2058271503 citedByCount "12" @default.
- W2058271503 countsByYear W20582715032023 @default.
- W2058271503 crossrefType "journal-article" @default.
- W2058271503 hasAuthorship W2058271503A5002497359 @default.
- W2058271503 hasAuthorship W2058271503A5025700709 @default.
- W2058271503 hasAuthorship W2058271503A5035462800 @default.
- W2058271503 hasAuthorship W2058271503A5076111342 @default.
- W2058271503 hasConcept C113196181 @default.
- W2058271503 hasConcept C120665830 @default.
- W2058271503 hasConcept C121332964 @default.
- W2058271503 hasConcept C185544564 @default.
- W2058271503 hasConcept C185592680 @default.
- W2058271503 hasConcept C191897082 @default.
- W2058271503 hasConcept C192562407 @default.
- W2058271503 hasConcept C207114421 @default.
- W2058271503 hasConcept C25442681 @default.
- W2058271503 hasConcept C2777855556 @default.
- W2058271503 hasConcept C2780901251 @default.
- W2058271503 hasConcept C43617362 @default.
- W2058271503 hasConcept C504270822 @default.
- W2058271503 hasConcept C544956773 @default.
- W2058271503 hasConcept C56052488 @default.
- W2058271503 hasConcept C77557913 @default.
- W2058271503 hasConcept C8010536 @default.
- W2058271503 hasConceptScore W2058271503C113196181 @default.
- W2058271503 hasConceptScore W2058271503C120665830 @default.
- W2058271503 hasConceptScore W2058271503C121332964 @default.
- W2058271503 hasConceptScore W2058271503C185544564 @default.
- W2058271503 hasConceptScore W2058271503C185592680 @default.
- W2058271503 hasConceptScore W2058271503C191897082 @default.
- W2058271503 hasConceptScore W2058271503C192562407 @default.
- W2058271503 hasConceptScore W2058271503C207114421 @default.
- W2058271503 hasConceptScore W2058271503C25442681 @default.
- W2058271503 hasConceptScore W2058271503C2777855556 @default.
- W2058271503 hasConceptScore W2058271503C2780901251 @default.
- W2058271503 hasConceptScore W2058271503C43617362 @default.
- W2058271503 hasConceptScore W2058271503C504270822 @default.
- W2058271503 hasConceptScore W2058271503C544956773 @default.
- W2058271503 hasConceptScore W2058271503C56052488 @default.
- W2058271503 hasConceptScore W2058271503C77557913 @default.
- W2058271503 hasConceptScore W2058271503C8010536 @default.
- W2058271503 hasIssue "13" @default.
- W2058271503 hasLocation W20582715031 @default.
- W2058271503 hasOpenAccess W2058271503 @default.
- W2058271503 hasPrimaryLocation W20582715031 @default.
- W2058271503 hasRelatedWork W1968821690 @default.
- W2058271503 hasRelatedWork W1999569901 @default.
- W2058271503 hasRelatedWork W2007172593 @default.
- W2058271503 hasRelatedWork W2026925839 @default.
- W2058271503 hasRelatedWork W2056237858 @default.
- W2058271503 hasRelatedWork W2057575687 @default.
- W2058271503 hasRelatedWork W2071378809 @default.
- W2058271503 hasRelatedWork W2124032771 @default.
- W2058271503 hasRelatedWork W3111964179 @default.
- W2058271503 hasRelatedWork W4241268741 @default.
- W2058271503 hasVolume "53" @default.
- W2058271503 isParatext "false" @default.
- W2058271503 isRetracted "false" @default.
- W2058271503 magId "2058271503" @default.
- W2058271503 workType "article" @default.