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- W2058317907 abstract "The dissolution of interstitial-type end-of-range (EOR) damage in preamorphized Ge is shown to induce a transient enhanced diffusion of an epitaxially grown boron delta at temperatures above 350 °C that saturates above 420 °C. The B diffusion events are quantitatively correlated with the measured positive strain associated with the EOR damage as a function of the annealing temperature with an energy barrier for the EOR damage dissolution of 2.1±0.3 eV. These results unambiguously demonstrate that B diffuses in Ge through a mechanism assisted by self-interstitials, and impose considering the interstitial implantation damage for the modeling of impurity diffusion in Ge." @default.
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- W2058317907 date "2010-05-17" @default.
- W2058317907 modified "2023-09-26" @default.
- W2058317907 title "Transient enhanced diffusion of B mediated by self-interstitials in preamorphized Ge" @default.
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- W2058317907 doi "https://doi.org/10.1063/1.3429084" @default.
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