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- W2058339943 abstract "According to the practical needs, a film thickness measure system based on capacitance sensor are designed integrated with the features of this kind of sensor. In this thesis, first analyzed the measure principle of capacitance sensor, and introduced the each component of this system, following elaborated working principle of high precision capacitance/ voltage converter IC CAV444 and its circuit design, at last, displayed the result of the overall test. The results showed this system can well measure the film thickness with the Precision higher than 1um, and can be widely used in online inspection of non-metallic material." @default.
- W2058339943 created "2016-06-24" @default.
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- W2058339943 date "2010-10-01" @default.
- W2058339943 modified "2023-10-01" @default.
- W2058339943 title "The design of film thickness measure system based on capacitance sensor" @default.
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- W2058339943 doi "https://doi.org/10.1109/iciss.2010.5656995" @default.
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