Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058395085> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2058395085 endingPage "1303" @default.
- W2058395085 startingPage "1299" @default.
- W2058395085 abstract "Thin films of (Ti,Al)N with different Al contents were co-deposited using one Ti and one Al targets by radio frequency (RF) pulsed magnetron sputtering. Their composition, microstructure, nanohardness, surface morphology and deposition process were investigated by energy dispersive spectrometer system, X-ray diffraction, nanoindentation, atomic force microscopy and optical emission spectrum. A face cubic centred (fcc) TiN (B1) structure was found in the thin films when Al target power was low. When Al target power was increased, an additional hexagonal AlN (B4) structure appeared. With increasing Al content, the resulting films gradually changed from B1 structure to that of B4, accompanying with decrease of the lattice constant of B1 structure. Simultaneously, the preferred orientation of B4 structural thin films gradually transformed from (111) to (200). The mode of thin films transformed from island to fibre, subsequently to column with increasing Al target power. Optical emission spectrum analysis indicated that Al target surface reached non-metal sputtering mode earlier than that of Ti target under the same deposition parameters, which resulted in a lower sputtering rate of Al target than Ti target and loss of Al content in (Ti,Al)N thin films." @default.
- W2058395085 created "2016-06-24" @default.
- W2058395085 creator A5005157774 @default.
- W2058395085 creator A5008785907 @default.
- W2058395085 creator A5052378603 @default.
- W2058395085 creator A5054157080 @default.
- W2058395085 creator A5060775856 @default.
- W2058395085 creator A5088870116 @default.
- W2058395085 date "2008-11-01" @default.
- W2058395085 modified "2023-10-05" @default.
- W2058395085 title "Deposition process, microstructure and mechanical behaviours of RF magnetron sputtered (Ti,Al)N thin films" @default.
- W2058395085 cites W1965745055 @default.
- W2058395085 cites W1978785415 @default.
- W2058395085 cites W1998420404 @default.
- W2058395085 cites W2001746950 @default.
- W2058395085 cites W2004380144 @default.
- W2058395085 cites W2011088261 @default.
- W2058395085 cites W2036851318 @default.
- W2058395085 cites W2042705332 @default.
- W2058395085 cites W2068621877 @default.
- W2058395085 cites W2075291127 @default.
- W2058395085 cites W2088138654 @default.
- W2058395085 doi "https://doi.org/10.1179/174328407x158659" @default.
- W2058395085 hasPublicationYear "2008" @default.
- W2058395085 type Work @default.
- W2058395085 sameAs 2058395085 @default.
- W2058395085 citedByCount "1" @default.
- W2058395085 countsByYear W20583950852013 @default.
- W2058395085 crossrefType "journal-article" @default.
- W2058395085 hasAuthorship W2058395085A5005157774 @default.
- W2058395085 hasAuthorship W2058395085A5008785907 @default.
- W2058395085 hasAuthorship W2058395085A5052378603 @default.
- W2058395085 hasAuthorship W2058395085A5054157080 @default.
- W2058395085 hasAuthorship W2058395085A5060775856 @default.
- W2058395085 hasAuthorship W2058395085A5088870116 @default.
- W2058395085 hasConcept C113196181 @default.
- W2058395085 hasConcept C120665830 @default.
- W2058395085 hasConcept C121332964 @default.
- W2058395085 hasConcept C123408415 @default.
- W2058395085 hasConcept C132612359 @default.
- W2058395085 hasConcept C151730666 @default.
- W2058395085 hasConcept C159985019 @default.
- W2058395085 hasConcept C171250308 @default.
- W2058395085 hasConcept C185592680 @default.
- W2058395085 hasConcept C19067145 @default.
- W2058395085 hasConcept C191897082 @default.
- W2058395085 hasConcept C192562407 @default.
- W2058395085 hasConcept C207114421 @default.
- W2058395085 hasConcept C22423302 @default.
- W2058395085 hasConcept C2816523 @default.
- W2058395085 hasConcept C43617362 @default.
- W2058395085 hasConcept C49326732 @default.
- W2058395085 hasConcept C525849907 @default.
- W2058395085 hasConcept C61427134 @default.
- W2058395085 hasConcept C64297162 @default.
- W2058395085 hasConcept C86803240 @default.
- W2058395085 hasConcept C87976508 @default.
- W2058395085 hasConceptScore W2058395085C113196181 @default.
- W2058395085 hasConceptScore W2058395085C120665830 @default.
- W2058395085 hasConceptScore W2058395085C121332964 @default.
- W2058395085 hasConceptScore W2058395085C123408415 @default.
- W2058395085 hasConceptScore W2058395085C132612359 @default.
- W2058395085 hasConceptScore W2058395085C151730666 @default.
- W2058395085 hasConceptScore W2058395085C159985019 @default.
- W2058395085 hasConceptScore W2058395085C171250308 @default.
- W2058395085 hasConceptScore W2058395085C185592680 @default.
- W2058395085 hasConceptScore W2058395085C19067145 @default.
- W2058395085 hasConceptScore W2058395085C191897082 @default.
- W2058395085 hasConceptScore W2058395085C192562407 @default.
- W2058395085 hasConceptScore W2058395085C207114421 @default.
- W2058395085 hasConceptScore W2058395085C22423302 @default.
- W2058395085 hasConceptScore W2058395085C2816523 @default.
- W2058395085 hasConceptScore W2058395085C43617362 @default.
- W2058395085 hasConceptScore W2058395085C49326732 @default.
- W2058395085 hasConceptScore W2058395085C525849907 @default.
- W2058395085 hasConceptScore W2058395085C61427134 @default.
- W2058395085 hasConceptScore W2058395085C64297162 @default.
- W2058395085 hasConceptScore W2058395085C86803240 @default.
- W2058395085 hasConceptScore W2058395085C87976508 @default.
- W2058395085 hasIssue "11" @default.
- W2058395085 hasLocation W20583950851 @default.
- W2058395085 hasOpenAccess W2058395085 @default.
- W2058395085 hasPrimaryLocation W20583950851 @default.
- W2058395085 hasRelatedWork W1968373997 @default.
- W2058395085 hasRelatedWork W1992829592 @default.
- W2058395085 hasRelatedWork W2002065584 @default.
- W2058395085 hasRelatedWork W2019423004 @default.
- W2058395085 hasRelatedWork W2366056091 @default.
- W2058395085 hasRelatedWork W2367592328 @default.
- W2058395085 hasRelatedWork W2599380658 @default.
- W2058395085 hasRelatedWork W3128827257 @default.
- W2058395085 hasRelatedWork W4254935110 @default.
- W2058395085 hasRelatedWork W4283766293 @default.
- W2058395085 hasVolume "24" @default.
- W2058395085 isParatext "false" @default.
- W2058395085 isRetracted "false" @default.
- W2058395085 magId "2058395085" @default.
- W2058395085 workType "article" @default.