Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058476450> ?p ?o ?g. }
- W2058476450 endingPage "30" @default.
- W2058476450 startingPage "16" @default.
- W2058476450 abstract "A structural electron microscopy study of (1 1 1)Si samples implanted with C++N+ at low energies (30 keV) and high-doses (5×1017 at. cm−2 for carbon ions and 6.7×1017 at. cm−2 for nitrogen ions) is reported in this paper. Implantations were carried out both at room and high (600 °C) temperatures. Samples implanted at high temperature and annealed after implantation show a buried layer consisting of a mixture of some amorphous component and single-crystalline crystallites (SiC and probably Si3N4 and C3N4) well oriented with respect to the (1 1 1)Si substrate. Both inclusions and amorphous phases are included into a well-aligned Si matrix. The crystalline structure of buried layers resulting after implantation at room and higher temperatures is reviewed. The obtained structural results are confronted to the actual literature. These are encouraging results in order to use the ion implantation to obtain stoichiometric crystalline thin layers." @default.
- W2058476450 created "2016-06-24" @default.
- W2058476450 creator A5000861627 @default.
- W2058476450 creator A5004683547 @default.
- W2058476450 creator A5018646629 @default.
- W2058476450 creator A5027646826 @default.
- W2058476450 creator A5057222702 @default.
- W2058476450 creator A5072077119 @default.
- W2058476450 creator A5078238183 @default.
- W2058476450 creator A5083302674 @default.
- W2058476450 date "2003-02-24" @default.
- W2058476450 modified "2023-10-16" @default.
- W2058476450 title "Transmission electron microscopy study of simultaneous high-dose C++N+ co-implantation into (111)Si" @default.
- W2058476450 cites W1555684668 @default.
- W2058476450 cites W1966374465 @default.
- W2058476450 cites W1967367559 @default.
- W2058476450 cites W1967770706 @default.
- W2058476450 cites W1968960622 @default.
- W2058476450 cites W1971506182 @default.
- W2058476450 cites W1975852195 @default.
- W2058476450 cites W1975997975 @default.
- W2058476450 cites W1977233714 @default.
- W2058476450 cites W1977796964 @default.
- W2058476450 cites W1982776328 @default.
- W2058476450 cites W1984480030 @default.
- W2058476450 cites W1986350679 @default.
- W2058476450 cites W1986888714 @default.
- W2058476450 cites W1990782080 @default.
- W2058476450 cites W1993888007 @default.
- W2058476450 cites W1993968739 @default.
- W2058476450 cites W1996471275 @default.
- W2058476450 cites W1996649146 @default.
- W2058476450 cites W2002566047 @default.
- W2058476450 cites W2002673168 @default.
- W2058476450 cites W2006483495 @default.
- W2058476450 cites W2008380538 @default.
- W2058476450 cites W2010819597 @default.
- W2058476450 cites W2015769918 @default.
- W2058476450 cites W2018554299 @default.
- W2058476450 cites W2021231247 @default.
- W2058476450 cites W2023014967 @default.
- W2058476450 cites W2025055337 @default.
- W2058476450 cites W2025610186 @default.
- W2058476450 cites W2028988265 @default.
- W2058476450 cites W2030099179 @default.
- W2058476450 cites W2037065043 @default.
- W2058476450 cites W2039852868 @default.
- W2058476450 cites W2042792306 @default.
- W2058476450 cites W2042843557 @default.
- W2058476450 cites W2044238983 @default.
- W2058476450 cites W2044422158 @default.
- W2058476450 cites W2045429735 @default.
- W2058476450 cites W2047464523 @default.
- W2058476450 cites W2051170226 @default.
- W2058476450 cites W2052325351 @default.
- W2058476450 cites W2061673692 @default.
- W2058476450 cites W2066686304 @default.
- W2058476450 cites W2067078148 @default.
- W2058476450 cites W2070138715 @default.
- W2058476450 cites W2077254305 @default.
- W2058476450 cites W2078544154 @default.
- W2058476450 cites W2078815758 @default.
- W2058476450 cites W2081445031 @default.
- W2058476450 cites W2084884569 @default.
- W2058476450 cites W2085916346 @default.
- W2058476450 cites W2087809463 @default.
- W2058476450 cites W2092332261 @default.
- W2058476450 cites W2109623174 @default.
- W2058476450 cites W2138375473 @default.
- W2058476450 cites W307276315 @default.
- W2058476450 cites W3167282244 @default.
- W2058476450 cites W605137691 @default.
- W2058476450 doi "https://doi.org/10.1016/s0040-6090(02)01284-1" @default.
- W2058476450 hasPublicationYear "2003" @default.
- W2058476450 type Work @default.
- W2058476450 sameAs 2058476450 @default.
- W2058476450 citedByCount "2" @default.
- W2058476450 countsByYear W20584764502014 @default.
- W2058476450 countsByYear W20584764502015 @default.
- W2058476450 crossrefType "journal-article" @default.
- W2058476450 hasAuthorship W2058476450A5000861627 @default.
- W2058476450 hasAuthorship W2058476450A5004683547 @default.
- W2058476450 hasAuthorship W2058476450A5018646629 @default.
- W2058476450 hasAuthorship W2058476450A5027646826 @default.
- W2058476450 hasAuthorship W2058476450A5057222702 @default.
- W2058476450 hasAuthorship W2058476450A5072077119 @default.
- W2058476450 hasAuthorship W2058476450A5078238183 @default.
- W2058476450 hasAuthorship W2058476450A5083302674 @default.
- W2058476450 hasConcept C113196181 @default.
- W2058476450 hasConcept C137637335 @default.
- W2058476450 hasConcept C144082473 @default.
- W2058476450 hasConcept C145148216 @default.
- W2058476450 hasConcept C146088050 @default.
- W2058476450 hasConcept C147789679 @default.
- W2058476450 hasConcept C171250308 @default.
- W2058476450 hasConcept C178790620 @default.
- W2058476450 hasConcept C185592680 @default.
- W2058476450 hasConcept C191897082 @default.