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- W2058490295 abstract "A novel surface acoustic wave (SAW) structure was developed which accurately measures the abutment between adjacent electron beam field patterns. The construction of large devices (ICs or SAWs) requires a mosaic consisting of many smaller 60 mil fields to cover a six inch photomask. ()System software acquires field edge alignment marks with tolerance increments of +125 A. The SAW device examined converts a spatial error of 1 microinch (0.025 micron) into a frequency difference of 65 kHz. This variation is easily measured with great precision in the frequency domain using an electronic counter. The SAW geometry is a simple test pattern which is easily reproduced on most electron beam pattern generators and consists of a single level of metallization on a piezoelectric substrate. A second SAW 5 us pulse compression filter was constructed in 16 consecutive fields and analyzed with regard to abutment errors. Misalignment could be detected from the filter's time domain impulse response.© (1979) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2058490295 created "2016-06-24" @default.
- W2058490295 creator A5039198183 @default.
- W2058490295 creator A5080909601 @default.
- W2058490295 date "1979-07-17" @default.
- W2058490295 modified "2023-09-23" @default.
- W2058490295 title "<title>E-Beam Lithography Field Abutment Characterization Using A Surface Acoustic Wave (SAW) Spatial Converter</title>" @default.
- W2058490295 doi "https://doi.org/10.1117/12.957184" @default.
- W2058490295 hasPublicationYear "1979" @default.
- W2058490295 type Work @default.
- W2058490295 sameAs 2058490295 @default.
- W2058490295 citedByCount "0" @default.
- W2058490295 crossrefType "proceedings-article" @default.
- W2058490295 hasAuthorship W2058490295A5039198183 @default.
- W2058490295 hasAuthorship W2058490295A5080909601 @default.
- W2058490295 hasConcept C120665830 @default.
- W2058490295 hasConcept C121332964 @default.
- W2058490295 hasConcept C162954803 @default.
- W2058490295 hasConcept C192562407 @default.
- W2058490295 hasConcept C24890656 @default.
- W2058490295 hasConceptScore W2058490295C120665830 @default.
- W2058490295 hasConceptScore W2058490295C121332964 @default.
- W2058490295 hasConceptScore W2058490295C162954803 @default.
- W2058490295 hasConceptScore W2058490295C192562407 @default.
- W2058490295 hasConceptScore W2058490295C24890656 @default.
- W2058490295 hasLocation W20584902951 @default.
- W2058490295 hasOpenAccess W2058490295 @default.
- W2058490295 hasPrimaryLocation W20584902951 @default.
- W2058490295 hasRelatedWork W1972003226 @default.
- W2058490295 hasRelatedWork W1977066390 @default.
- W2058490295 hasRelatedWork W1978692681 @default.
- W2058490295 hasRelatedWork W1993791172 @default.
- W2058490295 hasRelatedWork W1996771449 @default.
- W2058490295 hasRelatedWork W2002401866 @default.
- W2058490295 hasRelatedWork W2017452962 @default.
- W2058490295 hasRelatedWork W2027488438 @default.
- W2058490295 hasRelatedWork W2033243578 @default.
- W2058490295 hasRelatedWork W2038334119 @default.
- W2058490295 hasRelatedWork W2041862926 @default.
- W2058490295 hasRelatedWork W2042966852 @default.
- W2058490295 hasRelatedWork W2165743872 @default.
- W2058490295 hasRelatedWork W2172030931 @default.
- W2058490295 hasRelatedWork W2778396044 @default.
- W2058490295 hasRelatedWork W3114061344 @default.
- W2058490295 hasRelatedWork W1023825704 @default.
- W2058490295 hasRelatedWork W1554522217 @default.
- W2058490295 hasRelatedWork W2850482141 @default.
- W2058490295 hasRelatedWork W2876800668 @default.
- W2058490295 isParatext "false" @default.
- W2058490295 isRetracted "false" @default.
- W2058490295 magId "2058490295" @default.
- W2058490295 workType "article" @default.