Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058600116> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2058600116 endingPage "190" @default.
- W2058600116 startingPage "183" @default.
- W2058600116 abstract "This paper presents the inclined UV lithography in water medium and 3D mixing microchannel application. The theoretical limit of the inclination angle of the structure is determined by the difference of the refractive index between air and SU-8. In order to reduce the mismatch of the refractive index between air and photoresist, DI water was used as exposure medium instead of air. As a result, the maximum angle of the inclined structure was improved from 38.7° (in air) to 56.2° (in water). Fine and high aspect ratio SU-8 structures were obtained using UV exposure in water medium. As a microfluidic application, a microchannel having 3D slanted grooves was designed and fabricated. 45° slanted grooves were formed successfully on the sidewalls of the microchannel by using inclined UV exposure in water medium. Mixing efficiency of this microchannel was evaluated by CFD simulation and cross-sectional fluorescence image detection using confocal microscope." @default.
- W2058600116 created "2016-06-24" @default.
- W2058600116 creator A5032637565 @default.
- W2058600116 creator A5041031153 @default.
- W2058600116 creator A5060279300 @default.
- W2058600116 creator A5082562883 @default.
- W2058600116 date "2006-03-01" @default.
- W2058600116 modified "2023-10-18" @default.
- W2058600116 title "Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application" @default.
- W2058600116 cites W1979385312 @default.
- W2058600116 cites W2015538198 @default.
- W2058600116 cites W2048197073 @default.
- W2058600116 cites W2057814759 @default.
- W2058600116 cites W2089190438 @default.
- W2058600116 cites W2138421757 @default.
- W2058600116 cites W2182632123 @default.
- W2058600116 doi "https://doi.org/10.1016/j.sna.2005.12.043" @default.
- W2058600116 hasPublicationYear "2006" @default.
- W2058600116 type Work @default.
- W2058600116 sameAs 2058600116 @default.
- W2058600116 citedByCount "51" @default.
- W2058600116 countsByYear W20586001162012 @default.
- W2058600116 countsByYear W20586001162013 @default.
- W2058600116 countsByYear W20586001162014 @default.
- W2058600116 countsByYear W20586001162015 @default.
- W2058600116 countsByYear W20586001162016 @default.
- W2058600116 countsByYear W20586001162017 @default.
- W2058600116 countsByYear W20586001162018 @default.
- W2058600116 countsByYear W20586001162020 @default.
- W2058600116 countsByYear W20586001162021 @default.
- W2058600116 countsByYear W20586001162022 @default.
- W2058600116 countsByYear W20586001162023 @default.
- W2058600116 crossrefType "journal-article" @default.
- W2058600116 hasAuthorship W2058600116A5032637565 @default.
- W2058600116 hasAuthorship W2058600116A5041031153 @default.
- W2058600116 hasAuthorship W2058600116A5060279300 @default.
- W2058600116 hasAuthorship W2058600116A5082562883 @default.
- W2058600116 hasConcept C120665830 @default.
- W2058600116 hasConcept C121332964 @default.
- W2058600116 hasConcept C134406635 @default.
- W2058600116 hasConcept C138777275 @default.
- W2058600116 hasConcept C171250308 @default.
- W2058600116 hasConcept C192562407 @default.
- W2058600116 hasConcept C204223013 @default.
- W2058600116 hasConcept C2779227376 @default.
- W2058600116 hasConcept C42067758 @default.
- W2058600116 hasConcept C49040817 @default.
- W2058600116 hasConcept C62520636 @default.
- W2058600116 hasConcept C63662833 @default.
- W2058600116 hasConcept C8673954 @default.
- W2058600116 hasConceptScore W2058600116C120665830 @default.
- W2058600116 hasConceptScore W2058600116C121332964 @default.
- W2058600116 hasConceptScore W2058600116C134406635 @default.
- W2058600116 hasConceptScore W2058600116C138777275 @default.
- W2058600116 hasConceptScore W2058600116C171250308 @default.
- W2058600116 hasConceptScore W2058600116C192562407 @default.
- W2058600116 hasConceptScore W2058600116C204223013 @default.
- W2058600116 hasConceptScore W2058600116C2779227376 @default.
- W2058600116 hasConceptScore W2058600116C42067758 @default.
- W2058600116 hasConceptScore W2058600116C49040817 @default.
- W2058600116 hasConceptScore W2058600116C62520636 @default.
- W2058600116 hasConceptScore W2058600116C63662833 @default.
- W2058600116 hasConceptScore W2058600116C8673954 @default.
- W2058600116 hasIssue "1" @default.
- W2058600116 hasLocation W20586001161 @default.
- W2058600116 hasOpenAccess W2058600116 @default.
- W2058600116 hasPrimaryLocation W20586001161 @default.
- W2058600116 hasRelatedWork W1841820351 @default.
- W2058600116 hasRelatedWork W1977083628 @default.
- W2058600116 hasRelatedWork W1994967022 @default.
- W2058600116 hasRelatedWork W2001873846 @default.
- W2058600116 hasRelatedWork W2116016927 @default.
- W2058600116 hasRelatedWork W2142584595 @default.
- W2058600116 hasRelatedWork W2170052701 @default.
- W2058600116 hasRelatedWork W2183602760 @default.
- W2058600116 hasRelatedWork W2366206680 @default.
- W2058600116 hasRelatedWork W3085731770 @default.
- W2058600116 hasVolume "128" @default.
- W2058600116 isParatext "false" @default.
- W2058600116 isRetracted "false" @default.
- W2058600116 magId "2058600116" @default.
- W2058600116 workType "article" @default.