FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058703330> ?p ?o ?g. }

• W2058703330 endingPage "411" @default.
• W2058703330 startingPage "405" @default.
• W2058703330 abstract "In order to reveal the plasma etching processes on fused silica, the surface characterizations of fused silica after Ar/CF4 atmospheric pressure plasma processing were investigated. The morphology and chemistry evolution of fused silica surface were analyzed by AFM and XPS respectively. The AFM micrographs exhibited the three-dimensional surface topography and the RMS roughness changed with the increase of the material removal depth. The surfaces appeared to become smoother when the plasma etching occurred on the surface top layer. However, after the chemically modified layer was removed, etching resulted in the formation of a series of pits. During extended etching, the individual pits coalesced with one another, and the coalescence provided a means of reducing the depth of subsurface damage and the RMS roughness. The XPS results illustrated that small amount of radicals including C-CFn and CF-CFn could be introduced onto the fused silica surface during the Ar/CF4 plasma process, the fluorocarbon radicals were generated during CF4 plasma ionization. And the changes in relative concentration of the fluorocarbon radicals C-CFn with the removal depth were also studied." @default.
• W2058703330 created "2016-06-24" @default.
• W2058703330 creator A5025570176 @default.
• W2058703330 creator A5031315906 @default.
• W2058703330 creator A5053838491 @default.
• W2058703330 creator A5070648028 @default.
• W2058703330 creator A5087019529 @default.
• W2058703330 creator A5090316501 @default.
• W2058703330 date "2013-12-01" @default.
• W2058703330 modified "2023-09-28" @default.
• W2058703330 title "The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing" @default.
• W2058703330 cites W1968525924 @default.
• W2058703330 cites W1980262501 @default.
• W2058703330 cites W1980543413 @default.
• W2058703330 cites W1987424910 @default.
• W2058703330 cites W2002055142 @default.
• W2058703330 cites W2023190627 @default.
• W2058703330 cites W2030955837 @default.
• W2058703330 cites W2035804062 @default.
• W2058703330 cites W2045959306 @default.
• W2058703330 cites W2049201803 @default.
• W2058703330 cites W2049996595 @default.
• W2058703330 cites W2054070391 @default.
• W2058703330 cites W2058383835 @default.
• W2058703330 cites W2082311409 @default.
• W2058703330 cites W2086133421 @default.
• W2058703330 cites W2089983327 @default.
• W2058703330 cites W2095311261 @default.
• W2058703330 cites W2747276570 @default.
• W2058703330 cites W4229740612 @default.
• W2058703330 doi "https://doi.org/10.1016/j.apsusc.2013.09.100" @default.
• W2058703330 hasPublicationYear "2013" @default.
• W2058703330 type Work @default.
• W2058703330 sameAs 2058703330 @default.
• W2058703330 citedByCount "18" @default.
• W2058703330 countsByYear W20587033302015 @default.
• W2058703330 countsByYear W20587033302016 @default.
• W2058703330 countsByYear W20587033302017 @default.
• W2058703330 countsByYear W20587033302018 @default.
• W2058703330 countsByYear W20587033302020 @default.
• W2058703330 countsByYear W20587033302021 @default.
• W2058703330 countsByYear W20587033302022 @default.
• W2058703330 countsByYear W20587033302023 @default.
• W2058703330 crossrefType "journal-article" @default.
• W2058703330 hasAuthorship W2058703330A5025570176 @default.
• W2058703330 hasAuthorship W2058703330A5031315906 @default.
• W2058703330 hasAuthorship W2058703330A5053838491 @default.
• W2058703330 hasAuthorship W2058703330A5070648028 @default.
• W2058703330 hasAuthorship W2058703330A5087019529 @default.
• W2058703330 hasAuthorship W2058703330A5090316501 @default.
• W2058703330 hasConcept C100460472 @default.
• W2058703330 hasConcept C107187091 @default.
• W2058703330 hasConcept C107365816 @default.
• W2058703330 hasConcept C111368507 @default.
• W2058703330 hasConcept C113196181 @default.
• W2058703330 hasConcept C121332964 @default.
• W2058703330 hasConcept C127313418 @default.
• W2058703330 hasConcept C127413603 @default.
• W2058703330 hasConcept C139066938 @default.
• W2058703330 hasConcept C145738678 @default.
• W2058703330 hasConcept C149792144 @default.
• W2058703330 hasConcept C159985019 @default.
• W2058703330 hasConcept C175708663 @default.
• W2058703330 hasConcept C178790620 @default.
• W2058703330 hasConcept C185592680 @default.
• W2058703330 hasConcept C192562407 @default.
• W2058703330 hasConcept C200239111 @default.
• W2058703330 hasConcept C2776875633 @default.
• W2058703330 hasConcept C2779227376 @default.
• W2058703330 hasConcept C42360764 @default.
• W2058703330 hasConcept C499950583 @default.
• W2058703330 hasConcept C54355233 @default.
• W2058703330 hasConcept C62520636 @default.
• W2058703330 hasConcept C71039073 @default.
• W2058703330 hasConcept C82706917 @default.
• W2058703330 hasConcept C85344455 @default.
• W2058703330 hasConcept C86803240 @default.
• W2058703330 hasConcept C87355193 @default.
• W2058703330 hasConceptScore W2058703330C100460472 @default.
• W2058703330 hasConceptScore W2058703330C107187091 @default.
• W2058703330 hasConceptScore W2058703330C107365816 @default.
• W2058703330 hasConceptScore W2058703330C111368507 @default.
• W2058703330 hasConceptScore W2058703330C113196181 @default.
• W2058703330 hasConceptScore W2058703330C121332964 @default.
• W2058703330 hasConceptScore W2058703330C127313418 @default.
• W2058703330 hasConceptScore W2058703330C127413603 @default.
• W2058703330 hasConceptScore W2058703330C139066938 @default.
• W2058703330 hasConceptScore W2058703330C145738678 @default.
• W2058703330 hasConceptScore W2058703330C149792144 @default.
• W2058703330 hasConceptScore W2058703330C159985019 @default.
• W2058703330 hasConceptScore W2058703330C175708663 @default.
• W2058703330 hasConceptScore W2058703330C178790620 @default.
• W2058703330 hasConceptScore W2058703330C185592680 @default.
• W2058703330 hasConceptScore W2058703330C192562407 @default.
• W2058703330 hasConceptScore W2058703330C200239111 @default.
• W2058703330 hasConceptScore W2058703330C2776875633 @default.
• W2058703330 hasConceptScore W2058703330C2779227376 @default.
• W2058703330 hasConceptScore W2058703330C42360764 @default.

• next