Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058758034> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2058758034 abstract "We studied the effects of antimony (Sb) doping on strain relaxation in a silicon-germanium (SiGe) epitaxial film on a silicon substrate. Misfit strain relaxation proceeded faster in the Sb-doped SiGe than in the undoped film. However, the degree of enhancement did not correspond to the Sb concentration of the SiGe film below 700 °C. This was not expected from the effects of Sb on the threading dislocation velocity, which is larger in SiGe films with a higher Sb concentration. The results indicate that dislocation nucleation rather than the dislocation velocity had a substantial effect at low temperatures. On the other hand, relaxation was enhanced in the heavily Sb-doped film at 900 °C. We consider that this may be attributed to the enhancing effects of dislocation motion." @default.
- W2058758034 created "2016-06-24" @default.
- W2058758034 creator A5033615752 @default.
- W2058758034 creator A5034859729 @default.
- W2058758034 creator A5045973936 @default.
- W2058758034 creator A5053226621 @default.
- W2058758034 date "2014-01-01" @default.
- W2058758034 modified "2023-09-23" @default.
- W2058758034 title "Effects of Sb doping on strain relaxation in SiGe film on Si substrate" @default.
- W2058758034 doi "https://doi.org/10.1063/1.4865617" @default.
- W2058758034 hasPublicationYear "2014" @default.
- W2058758034 type Work @default.
- W2058758034 sameAs 2058758034 @default.
- W2058758034 citedByCount "0" @default.
- W2058758034 crossrefType "proceedings-article" @default.
- W2058758034 hasAuthorship W2058758034A5033615752 @default.
- W2058758034 hasAuthorship W2058758034A5034859729 @default.
- W2058758034 hasAuthorship W2058758034A5045973936 @default.
- W2058758034 hasAuthorship W2058758034A5053226621 @default.
- W2058758034 hasConcept C110738630 @default.
- W2058758034 hasConcept C111368507 @default.
- W2058758034 hasConcept C121332964 @default.
- W2058758034 hasConcept C126322002 @default.
- W2058758034 hasConcept C127313418 @default.
- W2058758034 hasConcept C149912024 @default.
- W2058758034 hasConcept C15744967 @default.
- W2058758034 hasConcept C159122135 @default.
- W2058758034 hasConcept C159985019 @default.
- W2058758034 hasConcept C178790620 @default.
- W2058758034 hasConcept C185592680 @default.
- W2058758034 hasConcept C191897082 @default.
- W2058758034 hasConcept C192562407 @default.
- W2058758034 hasConcept C202974441 @default.
- W2058758034 hasConcept C26873012 @default.
- W2058758034 hasConcept C2776029896 @default.
- W2058758034 hasConcept C2777289219 @default.
- W2058758034 hasConcept C2778022156 @default.
- W2058758034 hasConcept C2779227376 @default.
- W2058758034 hasConcept C2780389399 @default.
- W2058758034 hasConcept C49040817 @default.
- W2058758034 hasConcept C541565711 @default.
- W2058758034 hasConcept C544956773 @default.
- W2058758034 hasConcept C550623735 @default.
- W2058758034 hasConcept C57863236 @default.
- W2058758034 hasConcept C61048295 @default.
- W2058758034 hasConcept C71924100 @default.
- W2058758034 hasConcept C77805123 @default.
- W2058758034 hasConcept C8010536 @default.
- W2058758034 hasConceptScore W2058758034C110738630 @default.
- W2058758034 hasConceptScore W2058758034C111368507 @default.
- W2058758034 hasConceptScore W2058758034C121332964 @default.
- W2058758034 hasConceptScore W2058758034C126322002 @default.
- W2058758034 hasConceptScore W2058758034C127313418 @default.
- W2058758034 hasConceptScore W2058758034C149912024 @default.
- W2058758034 hasConceptScore W2058758034C15744967 @default.
- W2058758034 hasConceptScore W2058758034C159122135 @default.
- W2058758034 hasConceptScore W2058758034C159985019 @default.
- W2058758034 hasConceptScore W2058758034C178790620 @default.
- W2058758034 hasConceptScore W2058758034C185592680 @default.
- W2058758034 hasConceptScore W2058758034C191897082 @default.
- W2058758034 hasConceptScore W2058758034C192562407 @default.
- W2058758034 hasConceptScore W2058758034C202974441 @default.
- W2058758034 hasConceptScore W2058758034C26873012 @default.
- W2058758034 hasConceptScore W2058758034C2776029896 @default.
- W2058758034 hasConceptScore W2058758034C2777289219 @default.
- W2058758034 hasConceptScore W2058758034C2778022156 @default.
- W2058758034 hasConceptScore W2058758034C2779227376 @default.
- W2058758034 hasConceptScore W2058758034C2780389399 @default.
- W2058758034 hasConceptScore W2058758034C49040817 @default.
- W2058758034 hasConceptScore W2058758034C541565711 @default.
- W2058758034 hasConceptScore W2058758034C544956773 @default.
- W2058758034 hasConceptScore W2058758034C550623735 @default.
- W2058758034 hasConceptScore W2058758034C57863236 @default.
- W2058758034 hasConceptScore W2058758034C61048295 @default.
- W2058758034 hasConceptScore W2058758034C71924100 @default.
- W2058758034 hasConceptScore W2058758034C77805123 @default.
- W2058758034 hasConceptScore W2058758034C8010536 @default.
- W2058758034 hasLocation W20587580341 @default.
- W2058758034 hasOpenAccess W2058758034 @default.
- W2058758034 hasPrimaryLocation W20587580341 @default.
- W2058758034 hasRelatedWork W1756585478 @default.
- W2058758034 hasRelatedWork W1922871775 @default.
- W2058758034 hasRelatedWork W1994644634 @default.
- W2058758034 hasRelatedWork W1997477844 @default.
- W2058758034 hasRelatedWork W2027107519 @default.
- W2058758034 hasRelatedWork W2082111293 @default.
- W2058758034 hasRelatedWork W2087339032 @default.
- W2058758034 hasRelatedWork W2360488176 @default.
- W2058758034 hasRelatedWork W2626629291 @default.
- W2058758034 hasRelatedWork W3103185731 @default.
- W2058758034 isParatext "false" @default.
- W2058758034 isRetracted "false" @default.
- W2058758034 magId "2058758034" @default.
- W2058758034 workType "article" @default.