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- W2058842564 abstract "A high sensitivity capacitive silicon accelerometer with a new device structure is presented. The structure uses a fixed rigid electrode suspended between a proof mass and a stiff moving electrode to provide differential capacitance measurement and force-rebalancing. High sensitivity is achieved by forming a thick silicon proof mass and a narrow uniform air gap over a large area. The mechanical noise floor is reduced by incorporating damping holes in the electrodes. The measured sensitivity for a device with 2.6 mm/spl times/1 mm proof mass and 1.4 /spl mu/m air gap is /spl ap/100 pF/g. The calculated mechanical noise floor for the same device is 0.18 /spl mu///spl radic/Hz at atmosphere." @default.
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- W2058842564 date "1999-01-01" @default.
- W2058842564 modified "2023-09-26" @default.
- W2058842564 title "A high sensitivity capacitive microaccelerometer with a folded-electrode structure" @default.
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- W2058842564 doi "https://doi.org/10.1109/memsys.1999.746896" @default.
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