Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058882446> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2058882446 abstract "SEM is a powerful tool to analyze a non-planar surface using back-scattered (BS) and/or transmitted (TR) electrons. When an incident beam is scanned over a target surface, both BS and TR yields vary depending on the target topology. Determining the correspondence between the yield level and the exact position of target edges is one of the main tasks of SEM analysis. A generic solution can not be achieved due to the non-local character of electron yields and the effects of actual beam size and non-perfect edges of the target elements, together with other fine effects. However, computing experiments using Monte Carlo based simulations allow investigation of effects due to different target elements on the yield level for specific conditions1,2. Moreover, simulation of the beam scanning can be very useful for 'reconstruction' of the geometry from electron yield. This paper presents a Monte Carlo based SEM simulator and analyzes the results obtained. An approach to accurately localize target edge features is proposed." @default.
- W2058882446 created "2016-06-24" @default.
- W2058882446 creator A5088517266 @default.
- W2058882446 date "2002-07-01" @default.
- W2058882446 modified "2023-09-27" @default.
- W2058882446 title "Monte Carlo simulation of SEM for target with complex geometry" @default.
- W2058882446 doi "https://doi.org/10.1117/12.473529" @default.
- W2058882446 hasPublicationYear "2002" @default.
- W2058882446 type Work @default.
- W2058882446 sameAs 2058882446 @default.
- W2058882446 citedByCount "0" @default.
- W2058882446 crossrefType "proceedings-article" @default.
- W2058882446 hasAuthorship W2058882446A5088517266 @default.
- W2058882446 hasConcept C10138342 @default.
- W2058882446 hasConcept C105795698 @default.
- W2058882446 hasConcept C11413529 @default.
- W2058882446 hasConcept C114614502 @default.
- W2058882446 hasConcept C120665830 @default.
- W2058882446 hasConcept C121332964 @default.
- W2058882446 hasConcept C121684516 @default.
- W2058882446 hasConcept C134121241 @default.
- W2058882446 hasConcept C134786449 @default.
- W2058882446 hasConcept C147120987 @default.
- W2058882446 hasConcept C162307627 @default.
- W2058882446 hasConcept C162324750 @default.
- W2058882446 hasConcept C168834538 @default.
- W2058882446 hasConcept C184720557 @default.
- W2058882446 hasConcept C19499675 @default.
- W2058882446 hasConcept C198082294 @default.
- W2058882446 hasConcept C2524010 @default.
- W2058882446 hasConcept C2776799497 @default.
- W2058882446 hasConcept C30475298 @default.
- W2058882446 hasConcept C31972630 @default.
- W2058882446 hasConcept C33923547 @default.
- W2058882446 hasConcept C41008148 @default.
- W2058882446 hasConcept C44154836 @default.
- W2058882446 hasConcept C62520636 @default.
- W2058882446 hasConcept C95312477 @default.
- W2058882446 hasConcept C97355855 @default.
- W2058882446 hasConceptScore W2058882446C10138342 @default.
- W2058882446 hasConceptScore W2058882446C105795698 @default.
- W2058882446 hasConceptScore W2058882446C11413529 @default.
- W2058882446 hasConceptScore W2058882446C114614502 @default.
- W2058882446 hasConceptScore W2058882446C120665830 @default.
- W2058882446 hasConceptScore W2058882446C121332964 @default.
- W2058882446 hasConceptScore W2058882446C121684516 @default.
- W2058882446 hasConceptScore W2058882446C134121241 @default.
- W2058882446 hasConceptScore W2058882446C134786449 @default.
- W2058882446 hasConceptScore W2058882446C147120987 @default.
- W2058882446 hasConceptScore W2058882446C162307627 @default.
- W2058882446 hasConceptScore W2058882446C162324750 @default.
- W2058882446 hasConceptScore W2058882446C168834538 @default.
- W2058882446 hasConceptScore W2058882446C184720557 @default.
- W2058882446 hasConceptScore W2058882446C19499675 @default.
- W2058882446 hasConceptScore W2058882446C198082294 @default.
- W2058882446 hasConceptScore W2058882446C2524010 @default.
- W2058882446 hasConceptScore W2058882446C2776799497 @default.
- W2058882446 hasConceptScore W2058882446C30475298 @default.
- W2058882446 hasConceptScore W2058882446C31972630 @default.
- W2058882446 hasConceptScore W2058882446C33923547 @default.
- W2058882446 hasConceptScore W2058882446C41008148 @default.
- W2058882446 hasConceptScore W2058882446C44154836 @default.
- W2058882446 hasConceptScore W2058882446C62520636 @default.
- W2058882446 hasConceptScore W2058882446C95312477 @default.
- W2058882446 hasConceptScore W2058882446C97355855 @default.
- W2058882446 hasLocation W20588824461 @default.
- W2058882446 hasOpenAccess W2058882446 @default.
- W2058882446 hasPrimaryLocation W20588824461 @default.
- W2058882446 hasRelatedWork W165886954 @default.
- W2058882446 hasRelatedWork W1966750147 @default.
- W2058882446 hasRelatedWork W1974093413 @default.
- W2058882446 hasRelatedWork W1992783193 @default.
- W2058882446 hasRelatedWork W1999938650 @default.
- W2058882446 hasRelatedWork W2000807513 @default.
- W2058882446 hasRelatedWork W2009493739 @default.
- W2058882446 hasRelatedWork W2013927962 @default.
- W2058882446 hasRelatedWork W2021206727 @default.
- W2058882446 hasRelatedWork W2025169268 @default.
- W2058882446 hasRelatedWork W2044855969 @default.
- W2058882446 hasRelatedWork W2049954445 @default.
- W2058882446 hasRelatedWork W2067559900 @default.
- W2058882446 hasRelatedWork W2084058131 @default.
- W2058882446 hasRelatedWork W2086523632 @default.
- W2058882446 hasRelatedWork W2087456142 @default.
- W2058882446 hasRelatedWork W2090350482 @default.
- W2058882446 hasRelatedWork W2091536812 @default.
- W2058882446 hasRelatedWork W2094648246 @default.
- W2058882446 hasRelatedWork W2526666260 @default.
- W2058882446 isParatext "false" @default.
- W2058882446 isRetracted "false" @default.
- W2058882446 magId "2058882446" @default.
- W2058882446 workType "article" @default.