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• W2058902860 abstract "A new top-down fabrication process is described to prepare at the wafer-scale locally thinned down silicon nanowire field-effect devices." @default.
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• W2058902860 date "2014-01-01" @default.
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• W2058902860 title "Fabrication of locally thinned down silicon nanowires" @default.
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• W2058902860 doi "https://doi.org/10.1039/c4tc00046c" @default.
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