Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058902950> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2058902950 endingPage "L117" @default.
- W2058902950 startingPage "L117" @default.
- W2058902950 abstract "Optical emission spectroscopy of the SiH 4 -NH 3 -H 2 glow discharge revealed the presence of the reactive species, Si, SiH, NH, H, and H 2 in the plasma. The silane flow rate dependence of the emission intensities from these species has been well correlated with the growth rate of the resulting Si:N:H films and their compositional ratio of silicon to nitrogen. Furthermore, the numbers of SiH and NH bonds incorporated in the film are found to be proportional to the emission intensities of the SiH band and NH line, respectively. The growth mechanism of Si:N:H from the reactive SiH and NH molecules is discussed from these results." @default.
- W2058902950 created "2016-06-24" @default.
- W2058902950 creator A5010741341 @default.
- W2058902950 creator A5064562385 @default.
- W2058902950 creator A5068608208 @default.
- W2058902950 date "1981-02-01" @default.
- W2058902950 modified "2023-10-17" @default.
- W2058902950 title "Optical Emission Spectroscopy of the SiH<sub>4</sub>-NH<sub>3</sub>-H<sub>2</sub> Plasma during the Growth of Silicon Nitride" @default.
- W2058902950 cites W1990506098 @default.
- W2058902950 cites W1996541389 @default.
- W2058902950 cites W2029221103 @default.
- W2058902950 cites W2048049771 @default.
- W2058902950 cites W2069907632 @default.
- W2058902950 cites W2085377185 @default.
- W2058902950 cites W603460301 @default.
- W2058902950 doi "https://doi.org/10.1143/jjap.20.l117" @default.
- W2058902950 hasPublicationYear "1981" @default.
- W2058902950 type Work @default.
- W2058902950 sameAs 2058902950 @default.
- W2058902950 citedByCount "19" @default.
- W2058902950 countsByYear W20589029502014 @default.
- W2058902950 countsByYear W20589029502021 @default.
- W2058902950 countsByYear W20589029502022 @default.
- W2058902950 crossrefType "journal-article" @default.
- W2058902950 hasAuthorship W2058902950A5010741341 @default.
- W2058902950 hasAuthorship W2058902950A5064562385 @default.
- W2058902950 hasAuthorship W2058902950A5068608208 @default.
- W2058902950 hasConcept C113196181 @default.
- W2058902950 hasConcept C121332964 @default.
- W2058902950 hasConcept C1276947 @default.
- W2058902950 hasConcept C178790620 @default.
- W2058902950 hasConcept C185592680 @default.
- W2058902950 hasConcept C194760766 @default.
- W2058902950 hasConcept C2776595061 @default.
- W2058902950 hasConcept C2777431650 @default.
- W2058902950 hasConcept C2778024649 @default.
- W2058902950 hasConcept C2778183973 @default.
- W2058902950 hasConcept C2779227376 @default.
- W2058902950 hasConcept C32891209 @default.
- W2058902950 hasConcept C4839761 @default.
- W2058902950 hasConcept C537208039 @default.
- W2058902950 hasConcept C544956773 @default.
- W2058902950 hasConcept C62520636 @default.
- W2058902950 hasConcept C82706917 @default.
- W2058902950 hasConcept C96141758 @default.
- W2058902950 hasConceptScore W2058902950C113196181 @default.
- W2058902950 hasConceptScore W2058902950C121332964 @default.
- W2058902950 hasConceptScore W2058902950C1276947 @default.
- W2058902950 hasConceptScore W2058902950C178790620 @default.
- W2058902950 hasConceptScore W2058902950C185592680 @default.
- W2058902950 hasConceptScore W2058902950C194760766 @default.
- W2058902950 hasConceptScore W2058902950C2776595061 @default.
- W2058902950 hasConceptScore W2058902950C2777431650 @default.
- W2058902950 hasConceptScore W2058902950C2778024649 @default.
- W2058902950 hasConceptScore W2058902950C2778183973 @default.
- W2058902950 hasConceptScore W2058902950C2779227376 @default.
- W2058902950 hasConceptScore W2058902950C32891209 @default.
- W2058902950 hasConceptScore W2058902950C4839761 @default.
- W2058902950 hasConceptScore W2058902950C537208039 @default.
- W2058902950 hasConceptScore W2058902950C544956773 @default.
- W2058902950 hasConceptScore W2058902950C62520636 @default.
- W2058902950 hasConceptScore W2058902950C82706917 @default.
- W2058902950 hasConceptScore W2058902950C96141758 @default.
- W2058902950 hasIssue "2" @default.
- W2058902950 hasLocation W20589029501 @default.
- W2058902950 hasOpenAccess W2058902950 @default.
- W2058902950 hasPrimaryLocation W20589029501 @default.
- W2058902950 hasRelatedWork W1987210368 @default.
- W2058902950 hasRelatedWork W2029246527 @default.
- W2058902950 hasRelatedWork W2034400675 @default.
- W2058902950 hasRelatedWork W2046971764 @default.
- W2058902950 hasRelatedWork W2050764824 @default.
- W2058902950 hasRelatedWork W2054666090 @default.
- W2058902950 hasRelatedWork W2060837774 @default.
- W2058902950 hasRelatedWork W2073585986 @default.
- W2058902950 hasRelatedWork W2074148262 @default.
- W2058902950 hasRelatedWork W2129817874 @default.
- W2058902950 hasVolume "20" @default.
- W2058902950 isParatext "false" @default.
- W2058902950 isRetracted "false" @default.
- W2058902950 magId "2058902950" @default.
- W2058902950 workType "article" @default.