FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058906591> ?p ?o ?g. }

• W2058906591 endingPage "4151" @default.
• W2058906591 startingPage "4144" @default.
• W2058906591 abstract "Amorphous silicon nitride (a-SiNx) thin films were fabricated by pulsed reactive closed-field unbalanced magnetron sputtering ultra-high purity n-type single crystal silicon in Ar–N2 mixtures. The effect of N2 fraction on the discharge behavior, deposition rate, composition, chemical bonding configurations, surface morphology, nano-hardness, elastic modulus and optical band gap were primarily investigated. It was found that good stability of reactive sputtering process was maintained by the adoption of the bipolar pulsed magnetron power supply with 180° out-of-phase and the pulsed substrate bias. The arc events and the disappearing anode effect in DC reactive magnetron sputtering of a-SiNx films were prevented. A higher deposition rate (>20 nm/min) for a-SiNx films was achieved. The radical transition of the sputtering mode leads to the deposition rate initially decreased dramatically and then slowly with the increase of N2 fraction. N to Si atomic ratio (N/Si) gradually increased and N is preferentially incorporated in its NSi3 stoichiometric ratio configuration and the Si–N network followed a tendency to tetrahedral chemical order with the increase of N2 fraction in the inlet gases. The a-SiNx films deposited at high N2 fraction were consistently N-rich. The film surface microstructure was transformed from coarse granular mounds surrounded by tiny micro-void regions to homogeneous, continuous, dense and slender hills, as well as a progressive densification and refinement of the film microstructure occurs as the N2 fraction is increased. With the increase of the N/Si atomic ratio, the resistance of the a-SiNx films surface region to plastic deformation improved; hardness and elastic modulus increased, correspondingly. The as-sputtered a-SiNx films exhibit good optical transparency in visible region and the optical band gap Eopt can be varied in a broad range of 1.70–3.62 eV depending on the N2 fraction in Ar–N2 mixtures. The increment of optical band gap Eopt of the as-sputtered a-SiNx films is determined primarily by the recession of the valence band maximum." @default.
• W2058906591 created "2016-06-24" @default.
• W2058906591 creator A5007805313 @default.
• W2058906591 creator A5012037397 @default.
• W2058906591 creator A5036124466 @default.
• W2058906591 creator A5055233810 @default.
• W2058906591 creator A5065131416 @default.
• W2058906591 creator A5070747584 @default.
• W2058906591 creator A5077818382 @default.
• W2058906591 creator A5080521624 @default.
• W2058906591 date "2006-03-01" @default.
• W2058906591 modified "2023-09-26" @default.
• W2058906591 title "Fabrication and surface characterization of pulsed reactive closed-field unbalanced magnetron sputtered amorphous silicon nitride films" @default.
• W2058906591 cites W1969464536 @default.
• W2058906591 cites W1983236563 @default.
• W2058906591 cites W1996488513 @default.
• W2058906591 cites W1997496368 @default.
• W2058906591 cites W1998706663 @default.
• W2058906591 cites W1998779239 @default.
• W2058906591 cites W2002241035 @default.
• W2058906591 cites W2010310291 @default.
• W2058906591 cites W2011372166 @default.
• W2058906591 cites W2017048033 @default.
• W2058906591 cites W2024856015 @default.
• W2058906591 cites W2035444407 @default.
• W2058906591 cites W2048241602 @default.
• W2058906591 cites W2048690329 @default.
• W2058906591 cites W2051759825 @default.
• W2058906591 cites W2054614499 @default.
• W2058906591 cites W2058776344 @default.
• W2058906591 cites W2064528598 @default.
• W2058906591 cites W2072625023 @default.
• W2058906591 cites W2086933933 @default.
• W2058906591 cites W2092643337 @default.
• W2058906591 cites W2093298985 @default.
• W2058906591 cites W2094354124 @default.
• W2058906591 cites W2111397230 @default.
• W2058906591 cites W2131263522 @default.
• W2058906591 cites W2131339014 @default.
• W2058906591 cites W2137410918 @default.
• W2058906591 cites W2165045197 @default.
• W2058906591 doi "https://doi.org/10.1016/j.surfcoat.2004.12.007" @default.
• W2058906591 hasPublicationYear "2006" @default.
• W2058906591 type Work @default.
• W2058906591 sameAs 2058906591 @default.
• W2058906591 citedByCount "18" @default.
• W2058906591 countsByYear W20589065912013 @default.
• W2058906591 countsByYear W20589065912015 @default.
• W2058906591 countsByYear W20589065912016 @default.
• W2058906591 countsByYear W20589065912017 @default.
• W2058906591 countsByYear W20589065912018 @default.
• W2058906591 countsByYear W20589065912022 @default.
• W2058906591 countsByYear W20589065912023 @default.
• W2058906591 crossrefType "journal-article" @default.
• W2058906591 hasAuthorship W2058906591A5007805313 @default.
• W2058906591 hasAuthorship W2058906591A5012037397 @default.
• W2058906591 hasAuthorship W2058906591A5036124466 @default.
• W2058906591 hasAuthorship W2058906591A5055233810 @default.
• W2058906591 hasAuthorship W2058906591A5065131416 @default.
• W2058906591 hasAuthorship W2058906591A5070747584 @default.
• W2058906591 hasAuthorship W2058906591A5077818382 @default.
• W2058906591 hasAuthorship W2058906591A5080521624 @default.
• W2058906591 hasConcept C113196181 @default.
• W2058906591 hasConcept C159985019 @default.
• W2058906591 hasConcept C171250308 @default.
• W2058906591 hasConcept C185592680 @default.
• W2058906591 hasConcept C19067145 @default.
• W2058906591 hasConcept C191897082 @default.
• W2058906591 hasConcept C192562407 @default.
• W2058906591 hasConcept C194760766 @default.
• W2058906591 hasConcept C22423302 @default.
• W2058906591 hasConcept C2779227376 @default.
• W2058906591 hasConcept C2781083372 @default.
• W2058906591 hasConcept C43617362 @default.
• W2058906591 hasConcept C544956773 @default.
• W2058906591 hasConcept C56052488 @default.
• W2058906591 hasConcept C61427134 @default.
• W2058906591 hasConcept C8010536 @default.
• W2058906591 hasConcept C87976508 @default.
• W2058906591 hasConceptScore W2058906591C113196181 @default.
• W2058906591 hasConceptScore W2058906591C159985019 @default.
• W2058906591 hasConceptScore W2058906591C171250308 @default.
• W2058906591 hasConceptScore W2058906591C185592680 @default.
• W2058906591 hasConceptScore W2058906591C19067145 @default.
• W2058906591 hasConceptScore W2058906591C191897082 @default.
• W2058906591 hasConceptScore W2058906591C192562407 @default.
• W2058906591 hasConceptScore W2058906591C194760766 @default.
• W2058906591 hasConceptScore W2058906591C22423302 @default.
• W2058906591 hasConceptScore W2058906591C2779227376 @default.
• W2058906591 hasConceptScore W2058906591C2781083372 @default.
• W2058906591 hasConceptScore W2058906591C43617362 @default.
• W2058906591 hasConceptScore W2058906591C544956773 @default.
• W2058906591 hasConceptScore W2058906591C56052488 @default.
• W2058906591 hasConceptScore W2058906591C61427134 @default.
• W2058906591 hasConceptScore W2058906591C8010536 @default.
• W2058906591 hasConceptScore W2058906591C87976508 @default.
• W2058906591 hasIssue "12-13" @default.
• W2058906591 hasLocation W20589065911 @default.

• next