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- W2058907041 abstract "CaF<SUB>2</SUB> has received increasing attention as a promising substrate for coatings in the VUV range. Optimization of the optical properties of these optical components requires the study of basic characteristics of the coated and uncoated CaF<SUB>2</SUB> substrates such as surface roughness, optical performance, absorption and scatter losses, and laser induced damage threshold. The investigations have revealed the influence of different substrate polishing grades on the quality of AR-193nm -and HR-193nm/0 degrees coated samples. LIDT values at the ArF-excimer laser wavelength were measured as high as 5.6 J/cm<SUP>2</SUP> and 4.6 J/cm<SUP>2</SUP> for the best AR- and HR-coated samples, respectively." @default.
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- W2058907041 date "1999-04-07" @default.
- W2058907041 modified "2023-09-23" @default.
- W2058907041 title "ArF radiation resistance of optical coatings on CaF 2 in relation to the surface finish of the substrate" @default.
- W2058907041 doi "https://doi.org/10.1117/12.344385" @default.
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