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• W2058911946 endingPage "033010" @default.
• W2058911946 startingPage "033010" @default.
• W2058911946 abstract "In this work, we have investigated the evolution of line roughness from the photoresist (PR) to the poly-silicon gate etch based on the composite SiO2/Si3N4/SiO2 (ONO) multilayer hard mask structure using a capacitively coupled plasma etcher. A severe line roughness could be observed during gate patterning when the PR pattern was directly transferred into the ONO hard mask. Then, the formation mechanisms of line roughness were the results of the effects of decomposed oxygen radical generated from the SiO2 mask because of ion bombardment and the rough surface morphology of poly-silicon that accelerates the etching of both the hard mask and the PR sidewalls by reflected ions. We found that a combination of an amorphous silicon (α-Si) capping layer and amorphous Si gate could effectively reduce the strong dependence of hard mask etch on PR and ions reflection effect from rough surface morphology of poly-silicon. Finally, our results have shown that the gate pattern with a fairly smooth line, without deformation, and with the gate length of 29 nm and the line width roughness of 3.4 nm can be achieved." @default.
• W2058911946 created "2016-06-24" @default.
• W2058911946 creator A5000869304 @default.
• W2058911946 creator A5010365065 @default.
• W2058911946 creator A5024729319 @default.
• W2058911946 creator A5029240863 @default.
• W2058911946 creator A5031004784 @default.
• W2058911946 creator A5031209470 @default.
• W2058911946 creator A5057844513 @default.
• W2058911946 creator A5082789515 @default.
• W2058911946 date "2014-08-27" @default.
• W2058911946 modified "2023-09-25" @default.
• W2058911946 title "Transistor gate line roughness formation and reduction in sub-30-nm gate patterning using multilayer hard mask structure" @default.
• W2058911946 cites W1680662765 @default.
• W2058911946 cites W1696993125 @default.
• W2058911946 cites W1970360133 @default.
• W2058911946 cites W1981111942 @default.
• W2058911946 cites W1987290395 @default.
• W2058911946 cites W1987380649 @default.
• W2058911946 cites W1988706967 @default.
• W2058911946 cites W1990096511 @default.
• W2058911946 cites W1991787082 @default.
• W2058911946 cites W1995198835 @default.
• W2058911946 cites W1999826237 @default.
• W2058911946 cites W2000689990 @default.
• W2058911946 cites W2009201618 @default.
• W2058911946 cites W2016951546 @default.
• W2058911946 cites W2017081645 @default.
• W2058911946 cites W2029187020 @default.
• W2058911946 cites W2060539575 @default.
• W2058911946 cites W2061553076 @default.
• W2058911946 cites W2073443942 @default.
• W2058911946 cites W2078639662 @default.
• W2058911946 cites W2085509970 @default.
• W2058911946 cites W2091059622 @default.
• W2058911946 cites W2108440977 @default.
• W2058911946 doi "https://doi.org/10.1117/1.jmm.13.3.033010" @default.
• W2058911946 hasPublicationYear "2014" @default.
• W2058911946 type Work @default.
• W2058911946 sameAs 2058911946 @default.
• W2058911946 citedByCount "6" @default.
• W2058911946 countsByYear W20589119462015 @default.
• W2058911946 countsByYear W20589119462016 @default.
• W2058911946 countsByYear W20589119462017 @default.
• W2058911946 countsByYear W20589119462021 @default.
• W2058911946 crossrefType "journal-article" @default.
• W2058911946 hasAuthorship W2058911946A5000869304 @default.
• W2058911946 hasAuthorship W2058911946A5010365065 @default.
• W2058911946 hasAuthorship W2058911946A5024729319 @default.
• W2058911946 hasAuthorship W2058911946A5029240863 @default.
• W2058911946 hasAuthorship W2058911946A5031004784 @default.
• W2058911946 hasAuthorship W2058911946A5031209470 @default.
• W2058911946 hasAuthorship W2058911946A5057844513 @default.
• W2058911946 hasAuthorship W2058911946A5082789515 @default.
• W2058911946 hasConcept C100460472 @default.
• W2058911946 hasConcept C107365816 @default.
• W2058911946 hasConcept C119599485 @default.
• W2058911946 hasConcept C127413603 @default.
• W2058911946 hasConcept C134406635 @default.
• W2058911946 hasConcept C159985019 @default.
• W2058911946 hasConcept C165801399 @default.
• W2058911946 hasConcept C171250308 @default.
• W2058911946 hasConcept C172385210 @default.
• W2058911946 hasConcept C185592680 @default.
• W2058911946 hasConcept C192562407 @default.
• W2058911946 hasConcept C2361726 @default.
• W2058911946 hasConcept C2776390347 @default.
• W2058911946 hasConcept C2779227376 @default.
• W2058911946 hasConcept C2779667780 @default.
• W2058911946 hasConcept C49040817 @default.
• W2058911946 hasConcept C51140833 @default.
• W2058911946 hasConcept C544956773 @default.
• W2058911946 hasConcept C56052488 @default.
• W2058911946 hasConcept C71039073 @default.
• W2058911946 hasConcept C8010536 @default.
• W2058911946 hasConceptScore W2058911946C100460472 @default.
• W2058911946 hasConceptScore W2058911946C107365816 @default.
• W2058911946 hasConceptScore W2058911946C119599485 @default.
• W2058911946 hasConceptScore W2058911946C127413603 @default.
• W2058911946 hasConceptScore W2058911946C134406635 @default.
• W2058911946 hasConceptScore W2058911946C159985019 @default.
• W2058911946 hasConceptScore W2058911946C165801399 @default.
• W2058911946 hasConceptScore W2058911946C171250308 @default.
• W2058911946 hasConceptScore W2058911946C172385210 @default.
• W2058911946 hasConceptScore W2058911946C185592680 @default.
• W2058911946 hasConceptScore W2058911946C192562407 @default.
• W2058911946 hasConceptScore W2058911946C2361726 @default.
• W2058911946 hasConceptScore W2058911946C2776390347 @default.
• W2058911946 hasConceptScore W2058911946C2779227376 @default.
• W2058911946 hasConceptScore W2058911946C2779667780 @default.
• W2058911946 hasConceptScore W2058911946C49040817 @default.
• W2058911946 hasConceptScore W2058911946C51140833 @default.
• W2058911946 hasConceptScore W2058911946C544956773 @default.
• W2058911946 hasConceptScore W2058911946C56052488 @default.
• W2058911946 hasConceptScore W2058911946C71039073 @default.
• W2058911946 hasConceptScore W2058911946C8010536 @default.
• W2058911946 hasIssue "3" @default.
• W2058911946 hasLocation W20589119461 @default.

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