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- W2058974578 abstract "A reexamination of some experimental results, including very high concentration phosphorus diffusion with self-interstitial injection, leads to the conclusion that P diffusion is assisted mainly by vacancies. This point is also strengthened by a simple calculation showing that the dominant defect for P diffusion plays the minor role in self-diffusion." @default.
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- W2058974578 title "Evidences that P diffusion in Si is assisted mainly by vacancies" @default.
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- W2058974578 doi "https://doi.org/10.1063/1.95944" @default.
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