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- W2059065328 abstract "The use of di-functional monomers such as 2,6- Bis(hydroxymethyl)-p-cresol has allowed the design of novolak resins having alternating architecture with enhanced o,o'-bonding order, specific end-groups and narrow molecular weight distribution. When compared with a conventional m-/p- cresol formaldehyde novolak, the new resins have a lower molecular weight and molecular weight distribution with no p-cresol enriched oligomer fractions. Generally, these resins are used without further processing. With the proper monomer selection novolak resins can be made with the appropriate hydrophilic balance and dissolution characteristics essential for advanced resist development and optimization. By coupling the resin properties with the properties of diazonaphthoquinone sulfonate esters that have a high resolution potential, two advanced sub 0.25 micrometers i- line resist prototypes were developed. With annular illumination, Resist Prototype I demonstrated excellent linear resolution of 0.22 micrometers and an exceptional focus latitude of 1.4 micrometers and 1.7 micrometers for the 0.23 micrometers and 0.25 micrometers dense L/S, respectively; while Resist Prototype II showed linear resolution of 0.18 micrometers L/S and outstanding focus latitudes of 1.6 micrometers and 1.7 micrometers for the 0.21 micrometers L/S and the 0.23 micrometers L/S, respectively." @default.
- W2059065328 created "2016-06-24" @default.
- W2059065328 creator A5005538089 @default.
- W2059065328 creator A5037580854 @default.
- W2059065328 creator A5044284453 @default.
- W2059065328 creator A5071141561 @default.
- W2059065328 creator A5090655692 @default.
- W2059065328 date "1999-06-11" @default.
- W2059065328 modified "2023-09-23" @default.
- W2059065328 title "Sub-0.25-μm i-line photoresist: the role of advanced resin technology" @default.
- W2059065328 doi "https://doi.org/10.1117/12.350263" @default.
- W2059065328 hasPublicationYear "1999" @default.
- W2059065328 type Work @default.
- W2059065328 sameAs 2059065328 @default.
- W2059065328 citedByCount "0" @default.
- W2059065328 crossrefType "proceedings-article" @default.
- W2059065328 hasAuthorship W2059065328A5005538089 @default.
- W2059065328 hasAuthorship W2059065328A5037580854 @default.
- W2059065328 hasAuthorship W2059065328A5044284453 @default.
- W2059065328 hasAuthorship W2059065328A5071141561 @default.
- W2059065328 hasAuthorship W2059065328A5090655692 @default.
- W2059065328 hasConcept C127413603 @default.
- W2059065328 hasConcept C134406635 @default.
- W2059065328 hasConcept C159985019 @default.
- W2059065328 hasConcept C166940927 @default.
- W2059065328 hasConcept C171250308 @default.
- W2059065328 hasConcept C178790620 @default.
- W2059065328 hasConcept C185592680 @default.
- W2059065328 hasConcept C188027245 @default.
- W2059065328 hasConcept C192562407 @default.
- W2059065328 hasConcept C2779227376 @default.
- W2059065328 hasConcept C2780591741 @default.
- W2059065328 hasConcept C2780642029 @default.
- W2059065328 hasConcept C42360764 @default.
- W2059065328 hasConcept C521977710 @default.
- W2059065328 hasConcept C53524968 @default.
- W2059065328 hasConcept C71240020 @default.
- W2059065328 hasConcept C77066764 @default.
- W2059065328 hasConcept C88380143 @default.
- W2059065328 hasConceptScore W2059065328C127413603 @default.
- W2059065328 hasConceptScore W2059065328C134406635 @default.
- W2059065328 hasConceptScore W2059065328C159985019 @default.
- W2059065328 hasConceptScore W2059065328C166940927 @default.
- W2059065328 hasConceptScore W2059065328C171250308 @default.
- W2059065328 hasConceptScore W2059065328C178790620 @default.
- W2059065328 hasConceptScore W2059065328C185592680 @default.
- W2059065328 hasConceptScore W2059065328C188027245 @default.
- W2059065328 hasConceptScore W2059065328C192562407 @default.
- W2059065328 hasConceptScore W2059065328C2779227376 @default.
- W2059065328 hasConceptScore W2059065328C2780591741 @default.
- W2059065328 hasConceptScore W2059065328C2780642029 @default.
- W2059065328 hasConceptScore W2059065328C42360764 @default.
- W2059065328 hasConceptScore W2059065328C521977710 @default.
- W2059065328 hasConceptScore W2059065328C53524968 @default.
- W2059065328 hasConceptScore W2059065328C71240020 @default.
- W2059065328 hasConceptScore W2059065328C77066764 @default.
- W2059065328 hasConceptScore W2059065328C88380143 @default.
- W2059065328 hasLocation W20590653281 @default.
- W2059065328 hasOpenAccess W2059065328 @default.
- W2059065328 hasPrimaryLocation W20590653281 @default.
- W2059065328 hasRelatedWork W1970494037 @default.
- W2059065328 hasRelatedWork W1971687405 @default.
- W2059065328 hasRelatedWork W1999727231 @default.
- W2059065328 hasRelatedWork W2001510380 @default.
- W2059065328 hasRelatedWork W2001611257 @default.
- W2059065328 hasRelatedWork W2024901572 @default.
- W2059065328 hasRelatedWork W2027743605 @default.
- W2059065328 hasRelatedWork W2035864323 @default.
- W2059065328 hasRelatedWork W2043784030 @default.
- W2059065328 hasRelatedWork W2045837389 @default.
- W2059065328 hasRelatedWork W2047159369 @default.
- W2059065328 hasRelatedWork W2048781756 @default.
- W2059065328 hasRelatedWork W2054215624 @default.
- W2059065328 hasRelatedWork W2054821801 @default.
- W2059065328 hasRelatedWork W2059279274 @default.
- W2059065328 hasRelatedWork W2069299670 @default.
- W2059065328 hasRelatedWork W2077044700 @default.
- W2059065328 hasRelatedWork W2077581894 @default.
- W2059065328 hasRelatedWork W2282230668 @default.
- W2059065328 hasRelatedWork W2825299565 @default.
- W2059065328 isParatext "false" @default.
- W2059065328 isRetracted "false" @default.
- W2059065328 magId "2059065328" @default.
- W2059065328 workType "article" @default.