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• W2059096032 endingPage "240" @default.
• W2059096032 startingPage "231" @default.
• W2059096032 abstract "Dynamic processes of thin film growth by the sputter deposition method have been studied with special emphasis on the effects of the kinetic energies of sputtered particles on thin film properties. Regardless of the thin film preparation method, the thin film process is comprised of three elementary stages: decomposition, transport, and nucleation and growth mechanisms. During the decomposition stage, starting materials in the form of a gas, liquid or solid are decomposed into various fragments of neutrals or ions in the form of atoms, molecules, clusters or powders by external powers of plasma, laser, ion, microwave and thermal energies. The fragments thus formed have various kinetic energies depending on the decomposition mechanism. During sputter deposition, the primary ions with kinetic energies more than several hundred electron volts formed in a plasma bombarded the targets surface, giving rise to secondary sputtered particles with kinetic energies of 10–20 eV. This dynamic process of energy transfer from primary ions to the target was analyzed in detail by the precise measurement of kinetic energies of the sputtered particles. The particles formed by sputtering will travel through the media of sputtering gas and approach the substrate. This phase is referred to as the transport stage of the thin film process. Monte Carlo simulations are helpful in understanding the dynamic energy transport mechanisms. Finally, the chemical reaction between the fragments and the transport gas or adsorbed molecules on the substrate is also important in obtaining superior thin film properties. Consequently, it has become possible to control the thin film microstructure using the kinetic energies of the sputtered particles. Practical applications of high quality electrical films such as SiO2 and NiSiB are real evidence for the sophisticated thin film technology of sputtering." @default.
• W2059096032 created "2016-06-24" @default.
• W2059096032 creator A5016268056 @default.
• W2059096032 creator A5071862157 @default.
• W2059096032 date "1997-10-01" @default.
• W2059096032 modified "2023-10-10" @default.
• W2059096032 title "Role of kinetic energy of sputtered particles in thin film formation" @default.
• W2059096032 cites W1966004887 @default.
• W2059096032 cites W1972879459 @default.
• W2059096032 cites W1974292101 @default.
• W2059096032 cites W1981809770 @default.
• W2059096032 cites W2010391598 @default.
• W2059096032 cites W2011679519 @default.
• W2059096032 cites W2011919472 @default.
• W2059096032 cites W2025297303 @default.
• W2059096032 cites W2025972816 @default.
• W2059096032 cites W2030006781 @default.
• W2059096032 cites W2032273277 @default.
• W2059096032 cites W2046152702 @default.
• W2059096032 cites W2051808038 @default.
• W2059096032 cites W2052696315 @default.
• W2059096032 cites W2060668796 @default.
• W2059096032 cites W2070229679 @default.
• W2059096032 cites W2072550310 @default.
• W2059096032 cites W2073162203 @default.
• W2059096032 cites W2078398401 @default.
• W2059096032 cites W2087832267 @default.
• W2059096032 cites W2913762862 @default.
• W2059096032 cites W2959251520 @default.
• W2059096032 cites W4211244987 @default.
• W2059096032 cites W4230053467 @default.
• W2059096032 cites W4255313266 @default.
• W2059096032 doi "https://doi.org/10.1016/s0039-6028(97)00313-0" @default.
• W2059096032 hasPublicationYear "1997" @default.
• W2059096032 type Work @default.
• W2059096032 sameAs 2059096032 @default.
• W2059096032 citedByCount "25" @default.
• W2059096032 countsByYear W20590960322012 @default.
• W2059096032 countsByYear W20590960322018 @default.
• W2059096032 countsByYear W20590960322019 @default.
• W2059096032 countsByYear W20590960322020 @default.
• W2059096032 countsByYear W20590960322021 @default.
• W2059096032 countsByYear W20590960322022 @default.
• W2059096032 countsByYear W20590960322023 @default.
• W2059096032 crossrefType "journal-article" @default.
• W2059096032 hasAuthorship W2059096032A5016268056 @default.
• W2059096032 hasAuthorship W2059096032A5071862157 @default.
• W2059096032 hasConcept C105795698 @default.
• W2059096032 hasConcept C111368507 @default.
• W2059096032 hasConcept C113196181 @default.
• W2059096032 hasConcept C121332964 @default.
• W2059096032 hasConcept C127313418 @default.
• W2059096032 hasConcept C135889238 @default.
• W2059096032 hasConcept C145148216 @default.
• W2059096032 hasConcept C151730666 @default.
• W2059096032 hasConcept C159467904 @default.
• W2059096032 hasConcept C171250308 @default.
• W2059096032 hasConcept C178790620 @default.
• W2059096032 hasConcept C185592680 @default.
• W2059096032 hasConcept C19067145 @default.
• W2059096032 hasConcept C192562407 @default.
• W2059096032 hasConcept C19499675 @default.
• W2059096032 hasConcept C22423302 @default.
• W2059096032 hasConcept C2777289219 @default.
• W2059096032 hasConcept C2816523 @default.
• W2059096032 hasConcept C33923547 @default.
• W2059096032 hasConcept C45786274 @default.
• W2059096032 hasConcept C61048295 @default.
• W2059096032 hasConcept C61427134 @default.
• W2059096032 hasConcept C62520636 @default.
• W2059096032 hasConcept C64297162 @default.
• W2059096032 hasConcept C86803240 @default.
• W2059096032 hasConceptScore W2059096032C105795698 @default.
• W2059096032 hasConceptScore W2059096032C111368507 @default.
• W2059096032 hasConceptScore W2059096032C113196181 @default.
• W2059096032 hasConceptScore W2059096032C121332964 @default.
• W2059096032 hasConceptScore W2059096032C127313418 @default.
• W2059096032 hasConceptScore W2059096032C135889238 @default.
• W2059096032 hasConceptScore W2059096032C145148216 @default.
• W2059096032 hasConceptScore W2059096032C151730666 @default.
• W2059096032 hasConceptScore W2059096032C159467904 @default.
• W2059096032 hasConceptScore W2059096032C171250308 @default.
• W2059096032 hasConceptScore W2059096032C178790620 @default.
• W2059096032 hasConceptScore W2059096032C185592680 @default.
• W2059096032 hasConceptScore W2059096032C19067145 @default.
• W2059096032 hasConceptScore W2059096032C192562407 @default.
• W2059096032 hasConceptScore W2059096032C19499675 @default.
• W2059096032 hasConceptScore W2059096032C22423302 @default.
• W2059096032 hasConceptScore W2059096032C2777289219 @default.
• W2059096032 hasConceptScore W2059096032C2816523 @default.
• W2059096032 hasConceptScore W2059096032C33923547 @default.
• W2059096032 hasConceptScore W2059096032C45786274 @default.
• W2059096032 hasConceptScore W2059096032C61048295 @default.
• W2059096032 hasConceptScore W2059096032C61427134 @default.
• W2059096032 hasConceptScore W2059096032C62520636 @default.
• W2059096032 hasConceptScore W2059096032C64297162 @default.
• W2059096032 hasConceptScore W2059096032C86803240 @default.
• W2059096032 hasIssue "1-3" @default.

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