FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2059172079> ?p ?o ?g. }

• W2059172079 endingPage "222106" @default.
• W2059172079 startingPage "222106" @default.
• W2059172079 abstract "We report on the fabrication of high-fidelity inverted-pyramids in crystalline silicon (c-Si) at the 1 μm scale through the selective removal of a silicon nitride (SiNx) hard-mask with a 522 nm femtosecond (fs) laser and subsequent alkaline potassium hydroxide (KOH) etching. Through a series of systematic experiments on a range of hard-mask thicknesses, the use of 20 nm thick SiNx film yielded a 0.6 μm diameter laser-ejected aperture in the hard-mask at a single pulse fluence of 0.45 J cm−2, resulting in 1 μm wide inverted-pyramid structure in c-Si after KOH etching. Anisotropic KOH etching of the partially amorphized c-Si underlying the fs-laser patterned hard mask was found to render clean (111) planes of c-Si. An array of inverted-pyramids on c-Si surfaces as large as 4 cm2 was produced with a defect density of less than 1 in 104. This facile, non-contact, and cleanroom-independent technique serves a variety of applications including anti-reflective texturing of thin c-Si for photovoltaics, wafer marking, labeling, and fabrication of microfluidic and optical devices or laboratories on silicon wafers." @default.
• W2059172079 created "2016-06-24" @default.
• W2059172079 creator A5021519081 @default.
• W2059172079 creator A5021552219 @default.
• W2059172079 creator A5046746167 @default.
• W2059172079 creator A5053374187 @default.
• W2059172079 creator A5072878260 @default.
• W2059172079 date "2012-11-26" @default.
• W2059172079 modified "2023-10-18" @default.
• W2059172079 title "Femtosecond laser direct hard mask writing for selective facile micron-scale inverted-pyramid patterning of silicon" @default.
• W2059172079 cites W1965041337 @default.
• W2059172079 cites W1966054033 @default.
• W2059172079 cites W1983853217 @default.
• W2059172079 cites W1992696257 @default.
• W2059172079 cites W1994571297 @default.
• W2059172079 cites W2000848072 @default.
• W2059172079 cites W2009908347 @default.
• W2059172079 cites W2010125073 @default.
• W2059172079 cites W2023954167 @default.
• W2059172079 cites W2048395195 @default.
• W2059172079 cites W2048490541 @default.
• W2059172079 cites W2050637892 @default.
• W2059172079 cites W2056454442 @default.
• W2059172079 cites W2058691379 @default.
• W2059172079 cites W2062841501 @default.
• W2059172079 cites W2079427306 @default.
• W2059172079 cites W2085187475 @default.
• W2059172079 cites W2086566880 @default.
• W2059172079 cites W2090770081 @default.
• W2059172079 cites W2093208169 @default.
• W2059172079 cites W2105720384 @default.
• W2059172079 cites W2121690949 @default.
• W2059172079 cites W2158417248 @default.
• W2059172079 cites W2158518047 @default.
• W2059172079 cites W2172157018 @default.
• W2059172079 cites W2329654314 @default.
• W2059172079 cites W2334731870 @default.
• W2059172079 cites W2474767992 @default.
• W2059172079 cites W66709549 @default.
• W2059172079 doi "https://doi.org/10.1063/1.4768689" @default.
• W2059172079 hasPublicationYear "2012" @default.
• W2059172079 type Work @default.
• W2059172079 sameAs 2059172079 @default.
• W2059172079 citedByCount "32" @default.
• W2059172079 countsByYear W20591720792013 @default.
• W2059172079 countsByYear W20591720792014 @default.
• W2059172079 countsByYear W20591720792015 @default.
• W2059172079 countsByYear W20591720792016 @default.
• W2059172079 countsByYear W20591720792017 @default.
• W2059172079 countsByYear W20591720792018 @default.
• W2059172079 countsByYear W20591720792019 @default.
• W2059172079 countsByYear W20591720792021 @default.
• W2059172079 countsByYear W20591720792022 @default.
• W2059172079 countsByYear W20591720792023 @default.
• W2059172079 crossrefType "journal-article" @default.
• W2059172079 hasAuthorship W2059172079A5021519081 @default.
• W2059172079 hasAuthorship W2059172079A5021552219 @default.
• W2059172079 hasAuthorship W2059172079A5046746167 @default.
• W2059172079 hasAuthorship W2059172079A5053374187 @default.
• W2059172079 hasAuthorship W2059172079A5072878260 @default.
• W2059172079 hasConcept C100460472 @default.
• W2059172079 hasConcept C120665830 @default.
• W2059172079 hasConcept C121332964 @default.
• W2059172079 hasConcept C130472188 @default.
• W2059172079 hasConcept C136525101 @default.
• W2059172079 hasConcept C142724271 @default.
• W2059172079 hasConcept C160671074 @default.
• W2059172079 hasConcept C167735695 @default.
• W2059172079 hasConcept C171250308 @default.
• W2059172079 hasConcept C192562407 @default.
• W2059172079 hasConcept C204787440 @default.
• W2059172079 hasConcept C2779227376 @default.
• W2059172079 hasConcept C2779667780 @default.
• W2059172079 hasConcept C49040817 @default.
• W2059172079 hasConcept C520434653 @default.
• W2059172079 hasConcept C544956773 @default.
• W2059172079 hasConcept C71924100 @default.
• W2059172079 hasConceptScore W2059172079C100460472 @default.
• W2059172079 hasConceptScore W2059172079C120665830 @default.
• W2059172079 hasConceptScore W2059172079C121332964 @default.
• W2059172079 hasConceptScore W2059172079C130472188 @default.
• W2059172079 hasConceptScore W2059172079C136525101 @default.
• W2059172079 hasConceptScore W2059172079C142724271 @default.
• W2059172079 hasConceptScore W2059172079C160671074 @default.
• W2059172079 hasConceptScore W2059172079C167735695 @default.
• W2059172079 hasConceptScore W2059172079C171250308 @default.
• W2059172079 hasConceptScore W2059172079C192562407 @default.
• W2059172079 hasConceptScore W2059172079C204787440 @default.
• W2059172079 hasConceptScore W2059172079C2779227376 @default.
• W2059172079 hasConceptScore W2059172079C2779667780 @default.
• W2059172079 hasConceptScore W2059172079C49040817 @default.
• W2059172079 hasConceptScore W2059172079C520434653 @default.
• W2059172079 hasConceptScore W2059172079C544956773 @default.
• W2059172079 hasConceptScore W2059172079C71924100 @default.
• W2059172079 hasIssue "22" @default.
• W2059172079 hasLocation W20591720791 @default.
• W2059172079 hasOpenAccess W2059172079 @default.
• W2059172079 hasPrimaryLocation W20591720791 @default.

• next