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• W2059281683 abstract "Scaled layers of HfO2 on LaGeOx on Ge grown by molecular beam deposition and their electrical properties and passivation are discussed. The interfacial LaGeOx thickness as well as the deposition temperature of the HfO2 cap are varied and the effects thereof on properties like peak mobility and interface trap distributions are compared. We report on negative threshold voltages, around -0.8 V, in combination with scaled devices with a minimum EOT of 1.4 nm, which shows beneficial characteristics for the LaGeOx passivation of Ge. The effect of various post-metallization anneals in FG and O2 is shown to improve the gate stack properties of the scaled samples, yielding higher peak mobilities with maximum values of about 120 cm2/Vs for annealed samples. The impact of LaGeOx interfacial layer thickness and HfO2 deposition temperature on the density of interface traps (Dit) distributions for as-deposited and annealed samples is discussed, and Hf in-diffusion into the LaGeOx is shown to be detrimental to its passivation of Ge. The Dit distributions are measured by the full conductance technique on MOSFETs at room temperature as well as 233 K and are then correlated with the mobilities extracted from the same devices." @default.
• W2059281683 created "2016-06-24" @default.
• W2059281683 creator A5008134176 @default.
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• W2059281683 date "2011-12-01" @default.
• W2059281683 modified "2023-09-28" @default.
• W2059281683 title "Mobility and Dit distributions for p-channel MOSFETs with HfO2/LaGeOx passivating layers on germanium" @default.
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• W2059281683 doi "https://doi.org/10.1063/1.3660717" @default.
• W2059281683 hasPublicationYear "2011" @default.
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