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• W2059306181 abstract "Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH4/(C2H5O)4Si/H2/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH4/H2 gases by the same deposition process." @default.
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• W2059306181 date "2003-07-01" @default.
• W2059306181 modified "2023-10-16" @default.
• W2059306181 title "Structural characteristics of diamond-like nanocomposite films grown by PECVD" @default.
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• W2059306181 doi "https://doi.org/10.1016/s0167-577x(03)00053-3" @default.
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