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- W2059328839 endingPage "376" @default.
- W2059328839 startingPage "372" @default.
- W2059328839 abstract "Abstract The formation of dislocations in silicon implanted with keV and MeV 69 Ga, 75 As, 115 In, 121 Sb, and 131 Xe ions at doses below the threshold for amorphization was studied. Implants at keV energies of these species do not lead to secondary defects after annealing. In contrast, after MeV ion implantation and annealing at 900°C for 15 min, bands of dislocations are formed if a critical amount of damage is generated during implantation. This secondary defect formation is observed because enough mobile Si interstitials are available to agglomerate into stable dislocation loops." @default.
- W2059328839 created "2016-06-24" @default.
- W2059328839 creator A5023931992 @default.
- W2059328839 creator A5029590588 @default.
- W2059328839 creator A5044638935 @default.
- W2059328839 creator A5053926543 @default.
- W2059328839 creator A5054567446 @default.
- W2059328839 creator A5059113181 @default.
- W2059328839 creator A5089201071 @default.
- W2059328839 date "1992-01-01" @default.
- W2059328839 modified "2023-10-14" @default.
- W2059328839 title "Pre-amorphization damage in Si(100) implanted with high mass MeV ions" @default.
- W2059328839 cites W1971506182 @default.
- W2059328839 cites W1976317665 @default.
- W2059328839 cites W2000505945 @default.
- W2059328839 cites W2013605471 @default.
- W2059328839 cites W2024172140 @default.
- W2059328839 cites W2026616691 @default.
- W2059328839 cites W2058962612 @default.
- W2059328839 cites W2079018447 @default.
- W2059328839 cites W2082864020 @default.
- W2059328839 cites W2088621693 @default.
- W2059328839 doi "https://doi.org/10.1016/0168-583x(92)95259-t" @default.
- W2059328839 hasPublicationYear "1992" @default.
- W2059328839 type Work @default.
- W2059328839 sameAs 2059328839 @default.
- W2059328839 citedByCount "6" @default.
- W2059328839 crossrefType "journal-article" @default.
- W2059328839 hasAuthorship W2059328839A5023931992 @default.
- W2059328839 hasAuthorship W2059328839A5029590588 @default.
- W2059328839 hasAuthorship W2059328839A5044638935 @default.
- W2059328839 hasAuthorship W2059328839A5053926543 @default.
- W2059328839 hasAuthorship W2059328839A5054567446 @default.
- W2059328839 hasAuthorship W2059328839A5059113181 @default.
- W2059328839 hasAuthorship W2059328839A5089201071 @default.
- W2059328839 hasConcept C121332964 @default.
- W2059328839 hasConcept C145148216 @default.
- W2059328839 hasConcept C177322064 @default.
- W2059328839 hasConcept C178790620 @default.
- W2059328839 hasConcept C185544564 @default.
- W2059328839 hasConcept C185592680 @default.
- W2059328839 hasConcept C192562407 @default.
- W2059328839 hasConceptScore W2059328839C121332964 @default.
- W2059328839 hasConceptScore W2059328839C145148216 @default.
- W2059328839 hasConceptScore W2059328839C177322064 @default.
- W2059328839 hasConceptScore W2059328839C178790620 @default.
- W2059328839 hasConceptScore W2059328839C185544564 @default.
- W2059328839 hasConceptScore W2059328839C185592680 @default.
- W2059328839 hasConceptScore W2059328839C192562407 @default.
- W2059328839 hasIssue "3" @default.
- W2059328839 hasLocation W20593288391 @default.
- W2059328839 hasOpenAccess W2059328839 @default.
- W2059328839 hasPrimaryLocation W20593288391 @default.
- W2059328839 hasRelatedWork W2018879842 @default.
- W2059328839 hasRelatedWork W2022286767 @default.
- W2059328839 hasRelatedWork W2319022049 @default.
- W2059328839 hasRelatedWork W2737498735 @default.
- W2059328839 hasRelatedWork W2744391499 @default.
- W2059328839 hasRelatedWork W2898370298 @default.
- W2059328839 hasRelatedWork W2899084033 @default.
- W2059328839 hasRelatedWork W3120461830 @default.
- W2059328839 hasRelatedWork W337785050 @default.
- W2059328839 hasRelatedWork W4292492973 @default.
- W2059328839 hasVolume "62" @default.
- W2059328839 isParatext "false" @default.
- W2059328839 isRetracted "false" @default.
- W2059328839 magId "2059328839" @default.
- W2059328839 workType "article" @default.