Matches in SemOpenAlex for { <https://semopenalex.org/work/W2059353978> ?p ?o ?g. }
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- W2059353978 endingPage "736" @default.
- W2059353978 startingPage "729" @default.
- W2059353978 abstract "With the invention of the atomic force microscope (AFM), we have been equipped with the appropriate tools to clarify surface and interface properties of condensed matter on nanometer scale. As an application of AFM on resist processing, the present author has already studied resist pattern adhesion, Young's modulus estimation, Surface hardened layer analysis by tip indentation and manipulation of polymer aggregate. Moreover, nanobubble analysis for immersion lithography has been analyzed. The AFM technique gives useful information to the field of the designing of resist processing." @default.
- W2059353978 created "2016-06-24" @default.
- W2059353978 creator A5048900251 @default.
- W2059353978 date "2005-01-01" @default.
- W2059353978 modified "2023-09-23" @default.
- W2059353978 title "Nanoscale Characterization in Resist Processing by using Atomic Force Microscope" @default.
- W2059353978 cites W1968194746 @default.
- W2059353978 cites W1995141085 @default.
- W2059353978 cites W2000465370 @default.
- W2059353978 cites W2002659096 @default.
- W2059353978 cites W2009400107 @default.
- W2059353978 cites W2014880400 @default.
- W2059353978 cites W2022558990 @default.
- W2059353978 cites W2040614146 @default.
- W2059353978 cites W2045511911 @default.
- W2059353978 cites W2045910125 @default.
- W2059353978 cites W2053727377 @default.
- W2059353978 cites W2055554078 @default.
- W2059353978 cites W2074322416 @default.
- W2059353978 cites W2169093541 @default.
- W2059353978 cites W3150248096 @default.
- W2059353978 doi "https://doi.org/10.2494/photopolymer.18.729" @default.
- W2059353978 hasPublicationYear "2005" @default.
- W2059353978 type Work @default.
- W2059353978 sameAs 2059353978 @default.
- W2059353978 citedByCount "1" @default.
- W2059353978 crossrefType "journal-article" @default.
- W2059353978 hasAuthorship W2059353978A5048900251 @default.
- W2059353978 hasBestOaLocation W20593539781 @default.
- W2059353978 hasConcept C102951782 @default.
- W2059353978 hasConcept C159985019 @default.
- W2059353978 hasConcept C171250308 @default.
- W2059353978 hasConcept C192562407 @default.
- W2059353978 hasConcept C200274948 @default.
- W2059353978 hasConcept C204223013 @default.
- W2059353978 hasConcept C2779227376 @default.
- W2059353978 hasConcept C2780841128 @default.
- W2059353978 hasConcept C2780902562 @default.
- W2059353978 hasConcept C45206210 @default.
- W2059353978 hasConcept C49040817 @default.
- W2059353978 hasConcept C521977710 @default.
- W2059353978 hasConcept C53524968 @default.
- W2059353978 hasConcept C77066764 @default.
- W2059353978 hasConcept C84416704 @default.
- W2059353978 hasConceptScore W2059353978C102951782 @default.
- W2059353978 hasConceptScore W2059353978C159985019 @default.
- W2059353978 hasConceptScore W2059353978C171250308 @default.
- W2059353978 hasConceptScore W2059353978C192562407 @default.
- W2059353978 hasConceptScore W2059353978C200274948 @default.
- W2059353978 hasConceptScore W2059353978C204223013 @default.
- W2059353978 hasConceptScore W2059353978C2779227376 @default.
- W2059353978 hasConceptScore W2059353978C2780841128 @default.
- W2059353978 hasConceptScore W2059353978C2780902562 @default.
- W2059353978 hasConceptScore W2059353978C45206210 @default.
- W2059353978 hasConceptScore W2059353978C49040817 @default.
- W2059353978 hasConceptScore W2059353978C521977710 @default.
- W2059353978 hasConceptScore W2059353978C53524968 @default.
- W2059353978 hasConceptScore W2059353978C77066764 @default.
- W2059353978 hasConceptScore W2059353978C84416704 @default.
- W2059353978 hasIssue "6" @default.
- W2059353978 hasLocation W20593539781 @default.
- W2059353978 hasOpenAccess W2059353978 @default.
- W2059353978 hasPrimaryLocation W20593539781 @default.
- W2059353978 hasRelatedWork W2010926930 @default.
- W2059353978 hasRelatedWork W2025646587 @default.
- W2059353978 hasRelatedWork W2059353978 @default.
- W2059353978 hasRelatedWork W2065173997 @default.
- W2059353978 hasRelatedWork W2355918739 @default.
- W2059353978 hasRelatedWork W2581383093 @default.
- W2059353978 hasRelatedWork W2603152586 @default.
- W2059353978 hasRelatedWork W2609645413 @default.
- W2059353978 hasRelatedWork W2748601471 @default.
- W2059353978 hasRelatedWork W3008287888 @default.
- W2059353978 hasVolume "18" @default.
- W2059353978 isParatext "false" @default.
- W2059353978 isRetracted "false" @default.
- W2059353978 magId "2059353978" @default.
- W2059353978 workType "article" @default.