Matches in SemOpenAlex for { <https://semopenalex.org/work/W2059549056> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2059549056 endingPage "023001" @default.
- W2059549056 startingPage "023001" @default.
- W2059549056 abstract "Line edge roughness (LER) and intrinsic bias of 193-nm photoresist based on two methacrylate polymers are evaluated over a range of base concentration. Roughness is characterized as a function of the image log slope of the aerial image, the gradient in photoacid concentration, and the gradient in polymer protecting groups. Use of the polymer protection gradient as a characteristic roughness metric accounts for the effects of base concentration. Results demonstrate that a methacrylate terpolymer exhibits an advantage over the copolymer resist by achieving lower roughness at smaller values for the polymer protection gradient, resulting in lower LER for patterning. Intrinsic bias is found to be a function of the concentration of base. Process window analysis demonstrates that a greater depth of focus can be achieved for resists with low intrinsic bias. However, a tradeoff in depth of focus with LER is found. Spectral analysis indicates resists with greater intrinsic bias exhibit greater correlation lengths. Systems with greater intrinsic bias demonstrate lesser roughness for patterned features, with a minimum roughness achieved at maximum intrinsic bias. Kinetics of deprotection are modeled to calculate the chemical contrast of each resist. Resists exhibiting the greatest chemical contrast are identified as materials that generate the least roughness." @default.
- W2059549056 created "2016-06-24" @default.
- W2059549056 creator A5026609396 @default.
- W2059549056 creator A5027381116 @default.
- W2059549056 creator A5040932462 @default.
- W2059549056 creator A5048247895 @default.
- W2059549056 creator A5049345485 @default.
- W2059549056 creator A5055329928 @default.
- W2059549056 creator A5062934675 @default.
- W2059549056 date "2006-04-01" @default.
- W2059549056 modified "2023-10-03" @default.
- W2059549056 title "Line edge roughness and intrinsic bias for two methacrylate polymer resist systems" @default.
- W2059549056 cites W1490419416 @default.
- W2059549056 cites W1965618765 @default.
- W2059549056 cites W1969681241 @default.
- W2059549056 cites W1978193960 @default.
- W2059549056 cites W1995096053 @default.
- W2059549056 cites W2000889678 @default.
- W2059549056 cites W2013912222 @default.
- W2059549056 cites W2014948129 @default.
- W2059549056 cites W2035788369 @default.
- W2059549056 cites W2046658518 @default.
- W2059549056 cites W2061733041 @default.
- W2059549056 cites W2066902510 @default.
- W2059549056 cites W2067697261 @default.
- W2059549056 cites W2075937573 @default.
- W2059549056 cites W2085985801 @default.
- W2059549056 cites W2098991036 @default.
- W2059549056 cites W2101603511 @default.
- W2059549056 cites W2101883489 @default.
- W2059549056 cites W2101975976 @default.
- W2059549056 cites W2144505424 @default.
- W2059549056 cites W2157133444 @default.
- W2059549056 cites W2539896073 @default.
- W2059549056 cites W592018936 @default.
- W2059549056 doi "https://doi.org/10.1117/1.2200675" @default.
- W2059549056 hasPublicationYear "2006" @default.
- W2059549056 type Work @default.
- W2059549056 sameAs 2059549056 @default.
- W2059549056 citedByCount "21" @default.
- W2059549056 countsByYear W20595490562012 @default.
- W2059549056 countsByYear W20595490562014 @default.
- W2059549056 countsByYear W20595490562016 @default.
- W2059549056 countsByYear W20595490562018 @default.
- W2059549056 countsByYear W20595490562021 @default.
- W2059549056 crossrefType "journal-article" @default.
- W2059549056 hasAuthorship W2059549056A5026609396 @default.
- W2059549056 hasAuthorship W2059549056A5027381116 @default.
- W2059549056 hasAuthorship W2059549056A5040932462 @default.
- W2059549056 hasAuthorship W2059549056A5048247895 @default.
- W2059549056 hasAuthorship W2059549056A5049345485 @default.
- W2059549056 hasAuthorship W2059549056A5055329928 @default.
- W2059549056 hasAuthorship W2059549056A5062934675 @default.
- W2059549056 hasConcept C107365816 @default.
- W2059549056 hasConcept C120665830 @default.
- W2059549056 hasConcept C121332964 @default.
- W2059549056 hasConcept C132050475 @default.
- W2059549056 hasConcept C134406635 @default.
- W2059549056 hasConcept C15920480 @default.
- W2059549056 hasConcept C159985019 @default.
- W2059549056 hasConcept C192562407 @default.
- W2059549056 hasConcept C2779227376 @default.
- W2059549056 hasConcept C521977710 @default.
- W2059549056 hasConcept C53524968 @default.
- W2059549056 hasConcept C71039073 @default.
- W2059549056 hasConceptScore W2059549056C107365816 @default.
- W2059549056 hasConceptScore W2059549056C120665830 @default.
- W2059549056 hasConceptScore W2059549056C121332964 @default.
- W2059549056 hasConceptScore W2059549056C132050475 @default.
- W2059549056 hasConceptScore W2059549056C134406635 @default.
- W2059549056 hasConceptScore W2059549056C15920480 @default.
- W2059549056 hasConceptScore W2059549056C159985019 @default.
- W2059549056 hasConceptScore W2059549056C192562407 @default.
- W2059549056 hasConceptScore W2059549056C2779227376 @default.
- W2059549056 hasConceptScore W2059549056C521977710 @default.
- W2059549056 hasConceptScore W2059549056C53524968 @default.
- W2059549056 hasConceptScore W2059549056C71039073 @default.
- W2059549056 hasIssue "2" @default.
- W2059549056 hasLocation W20595490561 @default.
- W2059549056 hasOpenAccess W2059549056 @default.
- W2059549056 hasPrimaryLocation W20595490561 @default.
- W2059549056 hasRelatedWork W1982761421 @default.
- W2059549056 hasRelatedWork W1985547450 @default.
- W2059549056 hasRelatedWork W1990167866 @default.
- W2059549056 hasRelatedWork W2013446260 @default.
- W2059549056 hasRelatedWork W2034506306 @default.
- W2059549056 hasRelatedWork W2062401168 @default.
- W2059549056 hasRelatedWork W2076275541 @default.
- W2059549056 hasRelatedWork W2090089314 @default.
- W2059549056 hasRelatedWork W2166424186 @default.
- W2059549056 hasRelatedWork W4243064344 @default.
- W2059549056 hasVolume "5" @default.
- W2059549056 isParatext "false" @default.
- W2059549056 isRetracted "false" @default.
- W2059549056 magId "2059549056" @default.
- W2059549056 workType "article" @default.