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- W2059636064 endingPage "040801" @default.
- W2059636064 startingPage "040801" @default.
- W2059636064 abstract "To keep pace with the miniaturization of next generation devices in applications such as electronics, biotechnology, and energy, their constituent polymer thin films must meet challenging requirements such as providing simultaneously ultrathin and conformal coatings. Traditional polymer deposition methods may not be suitable, and as a result, new fabrication methods are needed. Molecular layer deposition (MLD), as an analog to atomic layer deposition, provides precise control over many polymer film properties, such as thickness, composition, morphology, and conformality. Hence, MLD can be a powerful and novel method for fabrication of polymer films. This review article introduces the variety of polymer films that have been developed using MLD together with important film growth characteristics and properties. Examples of MLD polymer applications are provided as well. Finally, challenges and outlooks of the MLD technique are discussed." @default.
- W2059636064 created "2016-06-24" @default.
- W2059636064 creator A5045638894 @default.
- W2059636064 creator A5055080919 @default.
- W2059636064 date "2013-07-01" @default.
- W2059636064 modified "2023-10-16" @default.
- W2059636064 title "Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities" @default.
- W2059636064 cites W1645764499 @default.
- W2059636064 cites W1665344004 @default.
- W2059636064 cites W1964889455 @default.
- W2059636064 cites W1966794617 @default.
- W2059636064 cites W1970028970 @default.
- W2059636064 cites W1971371634 @default.
- W2059636064 cites W1972566389 @default.
- W2059636064 cites W1974107959 @default.
- W2059636064 cites W1977292655 @default.
- W2059636064 cites W1977607434 @default.
- W2059636064 cites W1977887399 @default.
- W2059636064 cites W1978209037 @default.
- W2059636064 cites W1981237622 @default.
- W2059636064 cites W1983373532 @default.
- W2059636064 cites W1984145497 @default.
- W2059636064 cites W1984871875 @default.
- W2059636064 cites W1990373627 @default.
- W2059636064 cites W1992510067 @default.
- W2059636064 cites W1994392457 @default.
- W2059636064 cites W1995836054 @default.
- W2059636064 cites W1999325919 @default.
- W2059636064 cites W2006908709 @default.
- W2059636064 cites W2007076490 @default.
- W2059636064 cites W2008365303 @default.
- W2059636064 cites W2015428536 @default.
- W2059636064 cites W2015517429 @default.
- W2059636064 cites W2015878742 @default.
- W2059636064 cites W2016630442 @default.
- W2059636064 cites W2019879943 @default.
- W2059636064 cites W2030058108 @default.
- W2059636064 cites W2037845903 @default.
- W2059636064 cites W2040908067 @default.
- W2059636064 cites W2046778260 @default.
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- W2059636064 cites W2059253033 @default.
- W2059636064 cites W2060807842 @default.
- W2059636064 cites W2061031454 @default.
- W2059636064 cites W2062348541 @default.
- W2059636064 cites W2062991695 @default.
- W2059636064 cites W2068555579 @default.
- W2059636064 cites W2069033470 @default.
- W2059636064 cites W2072033719 @default.
- W2059636064 cites W2072526654 @default.
- W2059636064 cites W2074767462 @default.
- W2059636064 cites W2077948549 @default.
- W2059636064 cites W2078244500 @default.
- W2059636064 cites W2080406988 @default.
- W2059636064 cites W2084775642 @default.
- W2059636064 cites W2086159645 @default.
- W2059636064 cites W2086187432 @default.
- W2059636064 cites W2089738587 @default.
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- W2059636064 cites W2094858777 @default.
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- W2059636064 cites W2102529464 @default.
- W2059636064 cites W2102760762 @default.
- W2059636064 cites W2106591441 @default.
- W2059636064 cites W2106879023 @default.
- W2059636064 cites W2111156460 @default.
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- W2059636064 cites W2127371360 @default.
- W2059636064 cites W2129780785 @default.
- W2059636064 cites W2133215229 @default.
- W2059636064 cites W2158932701 @default.
- W2059636064 cites W2165620954 @default.
- W2059636064 cites W2168543902 @default.
- W2059636064 cites W2315982753 @default.
- W2059636064 cites W2316579843 @default.
- W2059636064 cites W2316891595 @default.
- W2059636064 cites W2322464933 @default.
- W2059636064 cites W2329409615 @default.
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- W2059636064 doi "https://doi.org/10.1116/1.4804609" @default.
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