FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2059650171> ?p ?o ?g. }

• W2059650171 endingPage "245" @default.
• W2059650171 startingPage "238" @default.
• W2059650171 abstract "The contacting surfaces of a microfabricated polycrystalline silicon (polysilicon) double-clamped beam adhesion test structure have been modified with a thin ultra-hard, wear-resistant, and conformal silicon carbide (SiC) film. Adhesion forces in SiC-coated interfaces as a function of apparent area of contact have been determined quantitatively and compared with those in uncoated polysilicon contacts. Furthermore, contact reliability studies have been carried out by following the changes in physicochemical properties of the surfaces after >100 billion contact cycles. The results highlight the tribological benefits of SiC coating as a solid lubricant in devices undergoing cyclic contacts." @default.
• W2059650171 created "2016-06-24" @default.
• W2059650171 creator A5018055154 @default.
• W2059650171 creator A5040127386 @default.
• W2059650171 creator A5044463201 @default.
• W2059650171 creator A5058878305 @default.
• W2059650171 date "2013-04-01" @default.
• W2059650171 modified "2023-10-01" @default.
• W2059650171 title "Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating" @default.
• W2059650171 cites W1555043449 @default.
• W2059650171 cites W1975216008 @default.
• W2059650171 cites W1977248196 @default.
• W2059650171 cites W2005117580 @default.
• W2059650171 cites W2016352472 @default.
• W2059650171 cites W2017487172 @default.
• W2059650171 cites W2019583126 @default.
• W2059650171 cites W2026249950 @default.
• W2059650171 cites W2032427111 @default.
• W2059650171 cites W2035374954 @default.
• W2059650171 cites W2061774388 @default.
• W2059650171 cites W2069084391 @default.
• W2059650171 cites W2079443418 @default.
• W2059650171 cites W2080854208 @default.
• W2059650171 cites W2082271187 @default.
• W2059650171 cites W2085282485 @default.
• W2059650171 cites W2102374119 @default.
• W2059650171 cites W2103051216 @default.
• W2059650171 cites W2112541223 @default.
• W2059650171 cites W2132376727 @default.
• W2059650171 cites W2135658063 @default.
• W2059650171 cites W2145951828 @default.
• W2059650171 cites W2150796188 @default.
• W2059650171 cites W2154973672 @default.
• W2059650171 cites W2170940427 @default.
• W2059650171 cites W2177811239 @default.
• W2059650171 doi "https://doi.org/10.1016/j.sna.2013.01.036" @default.
• W2059650171 hasPublicationYear "2013" @default.
• W2059650171 type Work @default.
• W2059650171 sameAs 2059650171 @default.
• W2059650171 citedByCount "11" @default.
• W2059650171 countsByYear W20596501712013 @default.
• W2059650171 countsByYear W20596501712014 @default.
• W2059650171 countsByYear W20596501712015 @default.
• W2059650171 countsByYear W20596501712016 @default.
• W2059650171 countsByYear W20596501712017 @default.
• W2059650171 countsByYear W20596501712020 @default.
• W2059650171 crossrefType "journal-article" @default.
• W2059650171 hasAuthorship W2059650171A5018055154 @default.
• W2059650171 hasAuthorship W2059650171A5040127386 @default.
• W2059650171 hasAuthorship W2059650171A5044463201 @default.
• W2059650171 hasAuthorship W2059650171A5058878305 @default.
• W2059650171 hasConcept C159985019 @default.
• W2059650171 hasConcept C167310744 @default.
• W2059650171 hasConcept C171250308 @default.
• W2059650171 hasConcept C184608416 @default.
• W2059650171 hasConcept C19067145 @default.
• W2059650171 hasConcept C191897082 @default.
• W2059650171 hasConcept C192562407 @default.
• W2059650171 hasConcept C2779227376 @default.
• W2059650171 hasConcept C2780565262 @default.
• W2059650171 hasConcept C2780722187 @default.
• W2059650171 hasConcept C2780874159 @default.
• W2059650171 hasConcept C2781448156 @default.
• W2059650171 hasConcept C37977207 @default.
• W2059650171 hasConcept C544956773 @default.
• W2059650171 hasConcept C84416704 @default.
• W2059650171 hasConcept C87359718 @default.
• W2059650171 hasConceptScore W2059650171C159985019 @default.
• W2059650171 hasConceptScore W2059650171C167310744 @default.
• W2059650171 hasConceptScore W2059650171C171250308 @default.
• W2059650171 hasConceptScore W2059650171C184608416 @default.
• W2059650171 hasConceptScore W2059650171C19067145 @default.
• W2059650171 hasConceptScore W2059650171C191897082 @default.
• W2059650171 hasConceptScore W2059650171C192562407 @default.
• W2059650171 hasConceptScore W2059650171C2779227376 @default.
• W2059650171 hasConceptScore W2059650171C2780565262 @default.
• W2059650171 hasConceptScore W2059650171C2780722187 @default.
• W2059650171 hasConceptScore W2059650171C2780874159 @default.
• W2059650171 hasConceptScore W2059650171C2781448156 @default.
• W2059650171 hasConceptScore W2059650171C37977207 @default.
• W2059650171 hasConceptScore W2059650171C544956773 @default.
• W2059650171 hasConceptScore W2059650171C84416704 @default.
• W2059650171 hasConceptScore W2059650171C87359718 @default.
• W2059650171 hasLocation W20596501711 @default.
• W2059650171 hasOpenAccess W2059650171 @default.
• W2059650171 hasPrimaryLocation W20596501711 @default.
• W2059650171 hasRelatedWork W1980843058 @default.
• W2059650171 hasRelatedWork W2042369246 @default.
• W2059650171 hasRelatedWork W2045574154 @default.
• W2059650171 hasRelatedWork W2088049428 @default.
• W2059650171 hasRelatedWork W2316800831 @default.
• W2059650171 hasRelatedWork W2412990133 @default.
• W2059650171 hasRelatedWork W2985940919 @default.
• W2059650171 hasRelatedWork W41634768 @default.
• W2059650171 hasRelatedWork W4220720541 @default.
• W2059650171 hasRelatedWork W2089126117 @default.
• W2059650171 hasVolume "193" @default.
• W2059650171 isParatext "false" @default.

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