Matches in SemOpenAlex for { <https://semopenalex.org/work/W2059897114> ?p ?o ?g. }
- W2059897114 endingPage "123525" @default.
- W2059897114 startingPage "123525" @default.
- W2059897114 abstract "Hydrogenated amorphous carbon (a-C:H) films were prepared by plasma enhanced chemical vapor deposition using methane (CH4) plus krypton (Kr) mixed atmosphere. The depositions were performed as function of the bias voltage and krypton partial pressure. The goal of this work was to study the influence of krypton gas on the physical properties of a-C:H films deposited on the cathode electrode. Krypton concentration up to 1.6 at. %, determined by Rutherford Back-Scattering, was obtained at high Kr partial pressure and bias of −120 V. The structure of the films was analyzed by means of optical transmission spectroscopy, multi-wavelength Raman scattering and Fourier Transform Infrared spectroscopy. It was verified that the structure of the films remains unchanged up to a concentration of Kr of about 1.0 at. %. A slight graphitization of the films occurs for higher concentration. The observed variation in the film structure, optical band gap, stress, and hydrogen concentration were associated mainly with the subplantation process of hydrocarbons radicals, rather than the krypton ion energy." @default.
- W2059897114 created "2016-06-24" @default.
- W2059897114 creator A5010716128 @default.
- W2059897114 creator A5019976903 @default.
- W2059897114 creator A5026531244 @default.
- W2059897114 creator A5030298536 @default.
- W2059897114 creator A5063510509 @default.
- W2059897114 creator A5080222897 @default.
- W2059897114 date "2010-12-15" @default.
- W2059897114 modified "2023-10-02" @default.
- W2059897114 title "Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition" @default.
- W2059897114 cites W1964970274 @default.
- W2059897114 cites W1965431512 @default.
- W2059897114 cites W1965769936 @default.
- W2059897114 cites W1971260593 @default.
- W2059897114 cites W1973566553 @default.
- W2059897114 cites W1975966750 @default.
- W2059897114 cites W1981223668 @default.
- W2059897114 cites W1988133629 @default.
- W2059897114 cites W1993822380 @default.
- W2059897114 cites W1995716968 @default.
- W2059897114 cites W2001605900 @default.
- W2059897114 cites W2003090171 @default.
- W2059897114 cites W2014585037 @default.
- W2059897114 cites W2014951620 @default.
- W2059897114 cites W2017418574 @default.
- W2059897114 cites W2017427409 @default.
- W2059897114 cites W2018861749 @default.
- W2059897114 cites W2019460631 @default.
- W2059897114 cites W2022058961 @default.
- W2059897114 cites W2023263715 @default.
- W2059897114 cites W2029156225 @default.
- W2059897114 cites W2029872799 @default.
- W2059897114 cites W2031918282 @default.
- W2059897114 cites W2038404392 @default.
- W2059897114 cites W2048485192 @default.
- W2059897114 cites W2048639707 @default.
- W2059897114 cites W2050179754 @default.
- W2059897114 cites W2064136306 @default.
- W2059897114 cites W2064467938 @default.
- W2059897114 cites W2064900480 @default.
- W2059897114 cites W2064925207 @default.
- W2059897114 cites W2066036939 @default.
- W2059897114 cites W2067623685 @default.
- W2059897114 cites W2070784012 @default.
- W2059897114 cites W2074036302 @default.
- W2059897114 cites W2078851311 @default.
- W2059897114 cites W2079600794 @default.
- W2059897114 cites W2083249799 @default.
- W2059897114 cites W2083855830 @default.
- W2059897114 cites W2086345514 @default.
- W2059897114 cites W2088608948 @default.
- W2059897114 cites W2089973178 @default.
- W2059897114 cites W2090116919 @default.
- W2059897114 cites W2100317465 @default.
- W2059897114 cites W2142154122 @default.
- W2059897114 cites W2159174698 @default.
- W2059897114 cites W2235679284 @default.
- W2059897114 cites W4234275128 @default.
- W2059897114 cites W4361980079 @default.
- W2059897114 doi "https://doi.org/10.1063/1.3526000" @default.
- W2059897114 hasPublicationYear "2010" @default.
- W2059897114 type Work @default.
- W2059897114 sameAs 2059897114 @default.
- W2059897114 citedByCount "2" @default.
- W2059897114 countsByYear W20598971142013 @default.
- W2059897114 countsByYear W20598971142014 @default.
- W2059897114 crossrefType "journal-article" @default.
- W2059897114 hasAuthorship W2059897114A5010716128 @default.
- W2059897114 hasAuthorship W2059897114A5019976903 @default.
- W2059897114 hasAuthorship W2059897114A5026531244 @default.
- W2059897114 hasAuthorship W2059897114A5030298536 @default.
- W2059897114 hasAuthorship W2059897114A5063510509 @default.
- W2059897114 hasAuthorship W2059897114A5080222897 @default.
- W2059897114 hasBestOaLocation W20598971142 @default.
- W2059897114 hasConcept C113196181 @default.
- W2059897114 hasConcept C120665830 @default.
- W2059897114 hasConcept C121332964 @default.
- W2059897114 hasConcept C153642686 @default.
- W2059897114 hasConcept C160892712 @default.
- W2059897114 hasConcept C171250308 @default.
- W2059897114 hasConcept C178790620 @default.
- W2059897114 hasConcept C185592680 @default.
- W2059897114 hasConcept C192562407 @default.
- W2059897114 hasConcept C40003534 @default.
- W2059897114 hasConcept C43617362 @default.
- W2059897114 hasConcept C512968161 @default.
- W2059897114 hasConcept C521692839 @default.
- W2059897114 hasConcept C540031477 @default.
- W2059897114 hasConcept C547737533 @default.
- W2059897114 hasConcept C56052488 @default.
- W2059897114 hasConcept C57410435 @default.
- W2059897114 hasConcept C68463220 @default.
- W2059897114 hasConcept C8010536 @default.
- W2059897114 hasConceptScore W2059897114C113196181 @default.
- W2059897114 hasConceptScore W2059897114C120665830 @default.
- W2059897114 hasConceptScore W2059897114C121332964 @default.
- W2059897114 hasConceptScore W2059897114C153642686 @default.