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- W2059897711 abstract "Small angle x-ray scattering (SAXS) and deuterium secondary-ion-mass spectrometry (DSIMS) studies of the microstructure and hydrogen dynamics in undoped rf-sputter-deposited (RFS) and undoped and boron-doped electron-cyclotron-resonance-deposited (ECR) hydrogenated amorphous silicon carbides $(aensuremath{-}{mathrm{Si}}_{1ensuremath{-}x}{mathrm{C}}_{x}:mathrm{H})$ are described. In the RFS carbides with $xl~19 mathrm{at}.%,$ the SAXS indicated that the films contained elongated features larger than 20 nm with preferred orientation, consistent with a residual columnarlike growth of the films. In addition, the SAXS also included a clear nanostructural component consistent with roughly spherical nanovoids $ensuremath{sim}1.1 mathrm{nm}$ in diameter, of total content $0.5l~{C}_{mathrm{nV}}l~1.0 mathrm{vol}.%.$ ${C}_{mathrm{nV}}$ increased by $ensuremath{sim}100%$ after isochronal 1-h annealing at 300, 350, and $375ifmmode^circelsetextdegreefi{}mathrm{C},$ followed by further annealing for 2--15 hours at $375ifmmode^circelsetextdegreefi{}mathrm{C}.$ The growth of ${C}_{mathrm{nV}}$ was apparently due largely to a $ensuremath{sim}20%$ increase in the average void diameter. This growth was noticeably weaker than in similarly fabricated $aensuremath{-}mathrm{S}mathrm{i}:mathrm{H}.$ In RFS carbides with $xl~3$ at. %, the DSIMS yielded power-law time dependent H diffusion constants ${D(t)=D}_{00}(ensuremath{omega}{t)}^{ensuremath{-}ensuremath{alpha}},$ where the dispersion parameter $ensuremath{alpha}$ varied from 0 to $ensuremath{sim}0.5ifmmodepmelsetextpmfi{}0.1$ among the samples, but was temperature independent at $350ifmmode^circelsetextdegreefi{}l~Tl~475ifmmode^circelsetextdegreefi{}mathrm{C}.$ The moderate values of $ensuremath{alpha}$ are consistent with the moderate initial nanovoid contents ${C}_{mathrm{nV}}l~1.0$ vol. % determined by SAXS. The weak dependence of $ensuremath{alpha}$ on T is consistent with the weaker growth of the SAXS with annealing as compared to $aensuremath{-}mathrm{S}mathrm{i}:mathrm{H}.$ The values of activation energy ${E}_{a}(1000 mathrm{AA{}}mathrm{})$ for a diffusion length $L=1000 mathrm{AA{}}mathrm{}$ among the different films were $ensuremath{sim}1.7,$ $ensuremath{sim}1.4,$ and $ensuremath{sim}0.65 mathrm{eV}.$ While the first two values are similar to those found in $aensuremath{-}mathrm{S}mathrm{i}:mathrm{H},$ the nature of the anomalously low value of $ensuremath{sim}0.65 mathrm{eV}mathrm{}$ is not clear. In undoped ECR $aensuremath{-}{mathrm{Si}}_{0.86}{mathrm{C}}_{0.14}:mathrm{H},$ $D(t)$ exhibited a similar power-law time dependence, but $ensuremath{alpha}$ decreased from $ensuremath{sim}0.3$ at $350ifmmode^circelsetextdegreefi{}mathrm{C}$ and 400$ifmmode^circelsetextdegreefi{}mathrm{C}$ to $ensuremath{sim}0.1$ at $450ifmmode^circelsetextdegreefi{}mathrm{C},$ also consistent with a low ${C}_{mathrm{nV}}.$ Thus, in spite of the high-C content, the behavior of $ensuremath{alpha}$ was similar to that of typical $aensuremath{-}mathrm{S}mathrm{i}:mathrm{H}$ at lower temperatures, where it decreases at $Tl~350ifmmode^circelsetextdegreefi{}mathrm{C}.$ However, ${E}_{a}(1000 mathrm{AA{}}mathrm{})$ was an anomalously low $ensuremath{sim}1.0 mathrm{eV}.$ The evolution of the infrared (IR) spectra of both the RFS and ECR films showed that during annealing the Si-bonded H content decreases relative to the C-bonded H content, consistent with a transfer of H from Si- to C-bonded sites or hydrogen evolution. In addition, the reduction in the $2000ensuremath{-}{mathrm{cm}}^{ensuremath{-}1}$ band characteristic of bulk-like Si-H group was much greater than the reduction of the $2100ensuremath{-}{mathrm{cm}}^{ensuremath{-}1}$ band characteristic of surface Si-H, O-Si-H, and C-Si-H groups. Boron doping of the ECR carbides also reduced the bulklike Si-bonded H content, suggesting that it induces nanovoids, consistent with the observed suppression of long-range motion of most of the H and D atoms. However, a small fraction of the H atoms appeared to undergo fast diffusion, reminiscent of the fast diffusion in B-doped $aensuremath{-}mathrm{S}mathrm{i}:mathrm{H}.$" @default.
- W2059897711 created "2016-06-24" @default.
- W2059897711 creator A5002443171 @default.
- W2059897711 creator A5019506647 @default.
- W2059897711 creator A5054313209 @default.
- W2059897711 creator A5073050902 @default.
- W2059897711 creator A5079254891 @default.
- W2059897711 creator A5083116004 @default.
- W2059897711 date "1999-12-15" @default.
- W2059897711 modified "2023-09-27" @default.
- W2059897711 title "Microstructure and hydrogen dynamics in hydrogenated amorphous silicon carbides" @default.
- W2059897711 cites W1541256074 @default.
- W2059897711 cites W1965425002 @default.
- W2059897711 cites W1968759897 @default.
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- W2059897711 cites W2007604463 @default.
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- W2059897711 cites W2041581698 @default.
- W2059897711 cites W2042093899 @default.
- W2059897711 cites W2045070282 @default.
- W2059897711 cites W2049925536 @default.
- W2059897711 cites W2050654105 @default.
- W2059897711 cites W2053789687 @default.
- W2059897711 cites W2054436729 @default.
- W2059897711 cites W2061366640 @default.
- W2059897711 cites W2061891656 @default.
- W2059897711 cites W2062017493 @default.
- W2059897711 cites W2065177959 @default.
- W2059897711 cites W2067992922 @default.
- W2059897711 cites W2072658656 @default.
- W2059897711 cites W2076887004 @default.
- W2059897711 cites W2078082995 @default.
- W2059897711 cites W2080271642 @default.
- W2059897711 cites W2081682121 @default.
- W2059897711 cites W2083936243 @default.
- W2059897711 cites W2090082744 @default.
- W2059897711 cites W2092599107 @default.
- W2059897711 cites W4237289833 @default.
- W2059897711 cites W598131573 @default.
- W2059897711 doi "https://doi.org/10.1103/physrevb.60.15875" @default.
- W2059897711 hasPublicationYear "1999" @default.
- W2059897711 type Work @default.
- W2059897711 sameAs 2059897711 @default.
- W2059897711 citedByCount "11" @default.
- W2059897711 crossrefType "journal-article" @default.
- W2059897711 hasAuthorship W2059897711A5002443171 @default.
- W2059897711 hasAuthorship W2059897711A5019506647 @default.
- W2059897711 hasAuthorship W2059897711A5054313209 @default.
- W2059897711 hasAuthorship W2059897711A5073050902 @default.
- W2059897711 hasAuthorship W2059897711A5079254891 @default.
- W2059897711 hasAuthorship W2059897711A5083116004 @default.
- W2059897711 hasConcept C113196181 @default.
- W2059897711 hasConcept C120665830 @default.
- W2059897711 hasConcept C121332964 @default.
- W2059897711 hasConcept C185592680 @default.
- W2059897711 hasConcept C191486275 @default.
- W2059897711 hasConcept C191897082 @default.
- W2059897711 hasConcept C192562407 @default.
- W2059897711 hasConcept C2777855556 @default.
- W2059897711 hasConcept C43617362 @default.
- W2059897711 hasConcept C56052488 @default.
- W2059897711 hasConcept C8010536 @default.
- W2059897711 hasConcept C87976508 @default.
- W2059897711 hasConceptScore W2059897711C113196181 @default.
- W2059897711 hasConceptScore W2059897711C120665830 @default.
- W2059897711 hasConceptScore W2059897711C121332964 @default.
- W2059897711 hasConceptScore W2059897711C185592680 @default.
- W2059897711 hasConceptScore W2059897711C191486275 @default.
- W2059897711 hasConceptScore W2059897711C191897082 @default.
- W2059897711 hasConceptScore W2059897711C192562407 @default.
- W2059897711 hasConceptScore W2059897711C2777855556 @default.
- W2059897711 hasConceptScore W2059897711C43617362 @default.
- W2059897711 hasConceptScore W2059897711C56052488 @default.
- W2059897711 hasConceptScore W2059897711C8010536 @default.
- W2059897711 hasConceptScore W2059897711C87976508 @default.
- W2059897711 hasLocation W20598977111 @default.
- W2059897711 hasOpenAccess W2059897711 @default.
- W2059897711 hasPrimaryLocation W20598977111 @default.
- W2059897711 hasRelatedWork W1672262847 @default.
- W2059897711 hasRelatedWork W2014836747 @default.
- W2059897711 hasRelatedWork W2021361971 @default.
- W2059897711 hasRelatedWork W2022305004 @default.
- W2059897711 hasRelatedWork W2032393411 @default.
- W2059897711 hasRelatedWork W2046120134 @default.
- W2059897711 hasRelatedWork W2065440379 @default.
- W2059897711 hasRelatedWork W2069695520 @default.