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- W2059968157 abstract "This paper reports preliminary results of direct observation of a latent image formed in thick PMMA resist after X-ray exposure." @default.
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- W2059968157 date "1996-01-01" @default.
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- W2059968157 title "PMMA as an X-ray resist for micro-machining application: Latent image formation and thickness losses" @default.
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- W2059968157 doi "https://doi.org/10.1016/0167-9317(95)00305-3" @default.
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