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- W2059969386 abstract "A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(Zr <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> Ti <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1-x</sub> )O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> (PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600times3600times500 mum3) and a total chip size of 10times10 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam." @default.
- W2059969386 created "2016-06-24" @default.
- W2059969386 creator A5000564818 @default.
- W2059969386 creator A5003324275 @default.
- W2059969386 creator A5033301926 @default.
- W2059969386 creator A5083281543 @default.
- W2059969386 date "2006-10-01" @default.
- W2059969386 modified "2023-10-14" @default.
- W2059969386 title "MEMS Accelerometer with Screen Printed Piezoelectric Thick Film" @default.
- W2059969386 cites W2070220552 @default.
- W2059969386 doi "https://doi.org/10.1109/icsens.2007.355913" @default.
- W2059969386 hasPublicationYear "2006" @default.
- W2059969386 type Work @default.
- W2059969386 sameAs 2059969386 @default.
- W2059969386 citedByCount "7" @default.
- W2059969386 countsByYear W20599693862013 @default.
- W2059969386 countsByYear W20599693862018 @default.
- W2059969386 countsByYear W20599693862019 @default.
- W2059969386 countsByYear W20599693862022 @default.
- W2059969386 countsByYear W20599693862023 @default.
- W2059969386 crossrefType "proceedings-article" @default.
- W2059969386 hasAuthorship W2059969386A5000564818 @default.
- W2059969386 hasAuthorship W2059969386A5003324275 @default.
- W2059969386 hasAuthorship W2059969386A5033301926 @default.
- W2059969386 hasAuthorship W2059969386A5083281543 @default.
- W2059969386 hasBestOaLocation W20599693862 @default.
- W2059969386 hasConcept C100082104 @default.
- W2059969386 hasConcept C111919701 @default.
- W2059969386 hasConcept C113196181 @default.
- W2059969386 hasConcept C127413603 @default.
- W2059969386 hasConcept C159985019 @default.
- W2059969386 hasConcept C178790620 @default.
- W2059969386 hasConcept C185592680 @default.
- W2059969386 hasConcept C192562407 @default.
- W2059969386 hasConcept C21200559 @default.
- W2059969386 hasConcept C24326235 @default.
- W2059969386 hasConcept C37977207 @default.
- W2059969386 hasConcept C41008148 @default.
- W2059969386 hasConcept C49040817 @default.
- W2059969386 hasConcept C89805583 @default.
- W2059969386 hasConceptScore W2059969386C100082104 @default.
- W2059969386 hasConceptScore W2059969386C111919701 @default.
- W2059969386 hasConceptScore W2059969386C113196181 @default.
- W2059969386 hasConceptScore W2059969386C127413603 @default.
- W2059969386 hasConceptScore W2059969386C159985019 @default.
- W2059969386 hasConceptScore W2059969386C178790620 @default.
- W2059969386 hasConceptScore W2059969386C185592680 @default.
- W2059969386 hasConceptScore W2059969386C192562407 @default.
- W2059969386 hasConceptScore W2059969386C21200559 @default.
- W2059969386 hasConceptScore W2059969386C24326235 @default.
- W2059969386 hasConceptScore W2059969386C37977207 @default.
- W2059969386 hasConceptScore W2059969386C41008148 @default.
- W2059969386 hasConceptScore W2059969386C49040817 @default.
- W2059969386 hasConceptScore W2059969386C89805583 @default.
- W2059969386 hasLocation W20599693861 @default.
- W2059969386 hasLocation W20599693862 @default.
- W2059969386 hasOpenAccess W2059969386 @default.
- W2059969386 hasPrimaryLocation W20599693861 @default.
- W2059969386 hasRelatedWork W2113531532 @default.
- W2059969386 hasRelatedWork W2520125024 @default.
- W2059969386 hasRelatedWork W2756082459 @default.
- W2059969386 hasRelatedWork W2767067586 @default.
- W2059969386 hasRelatedWork W2795395678 @default.
- W2059969386 hasRelatedWork W2945028051 @default.
- W2059969386 hasRelatedWork W3024056985 @default.
- W2059969386 hasRelatedWork W3118684050 @default.
- W2059969386 hasRelatedWork W4285244973 @default.
- W2059969386 hasRelatedWork W2416817555 @default.
- W2059969386 isParatext "false" @default.
- W2059969386 isRetracted "false" @default.
- W2059969386 magId "2059969386" @default.
- W2059969386 workType "article" @default.