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• W2059970828 abstract "Porous silicon is used as a dielectric layer in a capacitive humidity sensor. The addition of a commercial surfactant to the electrolyte during porous-silicon formation has been found to affect significantly the adsorption properties of the layer, resulting in a much increased sensitivity and response speed. The structure of the formed porous layer is examined and compared with those formed using HF alone and a standard surfactant." @default.
• W2059970828 created "2016-06-24" @default.
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• W2059970828 date "1997-06-01" @default.
• W2059970828 modified "2023-10-01" @default.
• W2059970828 title "The effect of additives on the adsorption properties of porous silicon" @default.
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• W2059970828 doi "https://doi.org/10.1016/s0924-4247(97)80298-1" @default.
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