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- W2060072007 abstract "Abstract Diamond-like (hydrogenated amorphous carbon (a-C:H)) films have been investigated as protective gate insulator for gas-sensitive suspended-gate field effect transistors (SGFETs). The electrical film properties such as bulk and surface resistivity, dielectric constant, dielectric strength as well as interface state density to silicon have been characterized. The chemical stability with respect to gaseous species was measured with a Kelvin probe. The process sequence for the incorporation of a-C:H films into the SGFET is discussed. Gas measurements with SGFETs show that, in comparison with common insulators, a-C:H greatly improves device stability and reliability." @default.
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- W2060072007 date "1991-08-01" @default.
- W2060072007 modified "2023-09-27" @default.
- W2060072007 title "Diamond-like films as a protecting insulator for gas-detecting suspended-gate field effect transistors" @default.
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- W2060072007 doi "https://doi.org/10.1016/0257-8972(91)90348-z" @default.
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