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- W2060113132 abstract "The photochemical etching of gallium arsenide by chlorine was investigated using synchrotron radiation. At the substrate temperatures above 25°C, both the irradiated and nonirradiated regions were uniformly etched. In case of substrate temperatures below -25°C, highly selective etching was observed in the irradiated region. We considered that at low temperatures, etching reaction caused by gas-phase excitation is suppressed and photochemical surface reaction becomes dominant." @default.
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- W2060113132 date "1990-05-01" @default.
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- W2060113132 title "Photochemical Etching of GaAs using Synchrotron Radiation" @default.
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- W2060113132 doi "https://doi.org/10.1143/jjap.29.l709" @default.
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