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- W2060201770 abstract "The degradation mechanism during current and temperature stress of SiCr-O thin film resistors in integrated circuits is investigated closely by experiments with the use of various characterization techniques. It is found that the degradation in SiCr-O resistors is dominated by the migration of Si in the resistor from the anode electrode to the cathode electrode. The direction of material migration is contrary to EM process in metal interconnect lines. It is shown that only excess Si in the SiCr-O resistive film besides a stable phase of the material migrates while the material of the stable phase does not migrate nor degrade during further stress, which explains why voiding is never observed at the anode electrode of the resistor. The new understanding on the degradation mechanism points to a way to eliminate the degradation process in SiCr-O based devices (resistors or heating elements) by optimization of the material composition. In addition, the degradation is found to be strongly dependent on the length of the resistor - the shorter the resistor, the faster the drift of the resistance value in percentage, which is in contrast to the well-known Blech effect of EM process in metal lines. Such a length dependency of degradation rate suggests that the driving force for the migration process in SiCr-O is much stronger than for EM in metal lines." @default.
- W2060201770 created "2016-06-24" @default.
- W2060201770 creator A5007722626 @default.
- W2060201770 creator A5033715902 @default.
- W2060201770 date "2012-04-01" @default.
- W2060201770 modified "2023-09-24" @default.
- W2060201770 title "A novel degradation mechanism in SiCr-O based thin film resistors under temperature and current stress" @default.
- W2060201770 cites W1985106633 @default.
- W2060201770 cites W1990737447 @default.
- W2060201770 cites W2002986676 @default.
- W2060201770 cites W2007636133 @default.
- W2060201770 cites W2011073916 @default.
- W2060201770 cites W2043648601 @default.
- W2060201770 cites W2064583797 @default.
- W2060201770 cites W2071074154 @default.
- W2060201770 cites W2073941291 @default.
- W2060201770 cites W2083090974 @default.
- W2060201770 cites W2108193596 @default.
- W2060201770 cites W2128986482 @default.
- W2060201770 doi "https://doi.org/10.1109/irps.2012.6241898" @default.
- W2060201770 hasPublicationYear "2012" @default.
- W2060201770 type Work @default.
- W2060201770 sameAs 2060201770 @default.
- W2060201770 citedByCount "1" @default.
- W2060201770 countsByYear W20602017702018 @default.
- W2060201770 crossrefType "proceedings-article" @default.
- W2060201770 hasAuthorship W2060201770A5007722626 @default.
- W2060201770 hasAuthorship W2060201770A5033715902 @default.
- W2060201770 hasConcept C119599485 @default.
- W2060201770 hasConcept C127413603 @default.
- W2060201770 hasConcept C137488568 @default.
- W2060201770 hasConcept C138885662 @default.
- W2060201770 hasConcept C147789679 @default.
- W2060201770 hasConcept C159985019 @default.
- W2060201770 hasConcept C165801399 @default.
- W2060201770 hasConcept C17525397 @default.
- W2060201770 hasConcept C185592680 @default.
- W2060201770 hasConcept C192562407 @default.
- W2060201770 hasConcept C21036866 @default.
- W2060201770 hasConcept C24326235 @default.
- W2060201770 hasConcept C2779679103 @default.
- W2060201770 hasConcept C41895202 @default.
- W2060201770 hasConcept C49040817 @default.
- W2060201770 hasConcept C49110097 @default.
- W2060201770 hasConcept C6899612 @default.
- W2060201770 hasConcept C89395315 @default.
- W2060201770 hasConceptScore W2060201770C119599485 @default.
- W2060201770 hasConceptScore W2060201770C127413603 @default.
- W2060201770 hasConceptScore W2060201770C137488568 @default.
- W2060201770 hasConceptScore W2060201770C138885662 @default.
- W2060201770 hasConceptScore W2060201770C147789679 @default.
- W2060201770 hasConceptScore W2060201770C159985019 @default.
- W2060201770 hasConceptScore W2060201770C165801399 @default.
- W2060201770 hasConceptScore W2060201770C17525397 @default.
- W2060201770 hasConceptScore W2060201770C185592680 @default.
- W2060201770 hasConceptScore W2060201770C192562407 @default.
- W2060201770 hasConceptScore W2060201770C21036866 @default.
- W2060201770 hasConceptScore W2060201770C24326235 @default.
- W2060201770 hasConceptScore W2060201770C2779679103 @default.
- W2060201770 hasConceptScore W2060201770C41895202 @default.
- W2060201770 hasConceptScore W2060201770C49040817 @default.
- W2060201770 hasConceptScore W2060201770C49110097 @default.
- W2060201770 hasConceptScore W2060201770C6899612 @default.
- W2060201770 hasConceptScore W2060201770C89395315 @default.
- W2060201770 hasLocation W20602017701 @default.
- W2060201770 hasOpenAccess W2060201770 @default.
- W2060201770 hasPrimaryLocation W20602017701 @default.
- W2060201770 hasRelatedWork W1529271289 @default.
- W2060201770 hasRelatedWork W1557236636 @default.
- W2060201770 hasRelatedWork W1656753375 @default.
- W2060201770 hasRelatedWork W1967938174 @default.
- W2060201770 hasRelatedWork W1978144151 @default.
- W2060201770 hasRelatedWork W1987695381 @default.
- W2060201770 hasRelatedWork W2011401098 @default.
- W2060201770 hasRelatedWork W2017772709 @default.
- W2060201770 hasRelatedWork W2019524591 @default.
- W2060201770 hasRelatedWork W2050320577 @default.
- W2060201770 hasRelatedWork W2051725270 @default.
- W2060201770 hasRelatedWork W2059511742 @default.
- W2060201770 hasRelatedWork W2080696526 @default.
- W2060201770 hasRelatedWork W2096147292 @default.
- W2060201770 hasRelatedWork W2098495387 @default.
- W2060201770 hasRelatedWork W2103975499 @default.
- W2060201770 hasRelatedWork W2119511344 @default.
- W2060201770 hasRelatedWork W2174550159 @default.
- W2060201770 hasRelatedWork W2536564636 @default.
- W2060201770 hasRelatedWork W2541707224 @default.
- W2060201770 isParatext "false" @default.
- W2060201770 isRetracted "false" @default.
- W2060201770 magId "2060201770" @default.
- W2060201770 workType "article" @default.