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- W2060202261 endingPage "2502" @default.
- W2060202261 startingPage "2502" @default.
- W2060202261 abstract "Etching properties of WSi 2 are investigated with pulsed-electron cyclotron resonance (ECR) plasma. A new type of charge-induced notch, which appears at an inside line, has been discovered in polycide etching. By comparing the notch properties to reactive ion etch (RIE) lag characteristics, the deposition of a conductive film on the sidewall is suggested as the origin of the electrons. The RIE-lag is improved with pulse plasma due to a reduced dissociation of reaction byproducts. The dissociation of byproducts produces a large amount of tungsten. The actual quantity depends on the duty ratio of the pulse modulation, and continuous discharge is the worst case. The formation of volatile byproducts with pulse plasma also effectively reduces RIE-lag. The volatile byproducts are formed during afterglow, which produces an electron temperature lower than the W–Cl bond strength." @default.
- W2060202261 created "2016-06-24" @default.
- W2060202261 creator A5072711964 @default.
- W2060202261 creator A5074997038 @default.
- W2060202261 creator A5085122354 @default.
- W2060202261 creator A5088707804 @default.
- W2060202261 date "1997-04-01" @default.
- W2060202261 modified "2023-09-25" @default.
- W2060202261 title "Etching Characteristics of WSi<sub>2</sub> with Pulsed-Electron Cyclotron Resonance Plasma" @default.
- W2060202261 cites W1965625584 @default.
- W2060202261 cites W1971056578 @default.
- W2060202261 cites W1975351885 @default.
- W2060202261 cites W1987872112 @default.
- W2060202261 cites W2000829868 @default.
- W2060202261 cites W2010874052 @default.
- W2060202261 cites W2032043127 @default.
- W2060202261 doi "https://doi.org/10.1143/jjap.36.2502" @default.
- W2060202261 hasPublicationYear "1997" @default.
- W2060202261 type Work @default.
- W2060202261 sameAs 2060202261 @default.
- W2060202261 citedByCount "4" @default.
- W2060202261 countsByYear W20602022612017 @default.
- W2060202261 crossrefType "journal-article" @default.
- W2060202261 hasAuthorship W2060202261A5072711964 @default.
- W2060202261 hasAuthorship W2060202261A5074997038 @default.
- W2060202261 hasAuthorship W2060202261A5085122354 @default.
- W2060202261 hasAuthorship W2060202261A5088707804 @default.
- W2060202261 hasConcept C100460472 @default.
- W2060202261 hasConcept C102931765 @default.
- W2060202261 hasConcept C107187091 @default.
- W2060202261 hasConcept C113196181 @default.
- W2060202261 hasConcept C121332964 @default.
- W2060202261 hasConcept C1276947 @default.
- W2060202261 hasConcept C130472188 @default.
- W2060202261 hasConcept C145148216 @default.
- W2060202261 hasConcept C147120987 @default.
- W2060202261 hasConcept C147789679 @default.
- W2060202261 hasConcept C175361016 @default.
- W2060202261 hasConcept C17599544 @default.
- W2060202261 hasConcept C178790620 @default.
- W2060202261 hasConcept C184779094 @default.
- W2060202261 hasConcept C185592680 @default.
- W2060202261 hasConcept C2777036043 @default.
- W2060202261 hasConcept C2779227376 @default.
- W2060202261 hasConcept C43617362 @default.
- W2060202261 hasConcept C542268612 @default.
- W2060202261 hasConcept C62520636 @default.
- W2060202261 hasConcept C82706917 @default.
- W2060202261 hasConceptScore W2060202261C100460472 @default.
- W2060202261 hasConceptScore W2060202261C102931765 @default.
- W2060202261 hasConceptScore W2060202261C107187091 @default.
- W2060202261 hasConceptScore W2060202261C113196181 @default.
- W2060202261 hasConceptScore W2060202261C121332964 @default.
- W2060202261 hasConceptScore W2060202261C1276947 @default.
- W2060202261 hasConceptScore W2060202261C130472188 @default.
- W2060202261 hasConceptScore W2060202261C145148216 @default.
- W2060202261 hasConceptScore W2060202261C147120987 @default.
- W2060202261 hasConceptScore W2060202261C147789679 @default.
- W2060202261 hasConceptScore W2060202261C175361016 @default.
- W2060202261 hasConceptScore W2060202261C17599544 @default.
- W2060202261 hasConceptScore W2060202261C178790620 @default.
- W2060202261 hasConceptScore W2060202261C184779094 @default.
- W2060202261 hasConceptScore W2060202261C185592680 @default.
- W2060202261 hasConceptScore W2060202261C2777036043 @default.
- W2060202261 hasConceptScore W2060202261C2779227376 @default.
- W2060202261 hasConceptScore W2060202261C43617362 @default.
- W2060202261 hasConceptScore W2060202261C542268612 @default.
- W2060202261 hasConceptScore W2060202261C62520636 @default.
- W2060202261 hasConceptScore W2060202261C82706917 @default.
- W2060202261 hasIssue "4S" @default.
- W2060202261 hasLocation W20602022611 @default.
- W2060202261 hasOpenAccess W2060202261 @default.
- W2060202261 hasPrimaryLocation W20602022611 @default.
- W2060202261 hasRelatedWork W1520696696 @default.
- W2060202261 hasRelatedWork W1980089317 @default.
- W2060202261 hasRelatedWork W2010874052 @default.
- W2060202261 hasRelatedWork W2032552246 @default.
- W2060202261 hasRelatedWork W2034252264 @default.
- W2060202261 hasRelatedWork W2039888619 @default.
- W2060202261 hasRelatedWork W2045553774 @default.
- W2060202261 hasRelatedWork W2046861793 @default.
- W2060202261 hasRelatedWork W2092814893 @default.
- W2060202261 hasRelatedWork W849260343 @default.
- W2060202261 hasVolume "36" @default.
- W2060202261 isParatext "false" @default.
- W2060202261 isRetracted "false" @default.
- W2060202261 magId "2060202261" @default.
- W2060202261 workType "article" @default.