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- W2060208052 abstract "The rough grown surface of a diamond film deposited by the hot filament chemical vapour deposition (CVD) method was polished by thermomechanical polishing on a hot iron plate at 1173 K. The surface composition and structure of the polished diamond film were analysed by Raman spectroscopy, Auger electron spectroscopy (AES), thin film X-ray diffraction (XRD) and secondary ion mass spectrometry (SIMS). The graphitization of the near-surface region of the diamond film by the iron plate was observed during thermomechanical polishing. At the diamond film/Si interface, β-SiC was observed during the early stages of polishing, but after prolonged treatment the graphitization of the diamond film occurred rapidly." @default.
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- W2060208052 date "1996-06-01" @default.
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- W2060208052 title "Surface characterization of diamond films polished by thermomechanical polishing method" @default.
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- W2060208052 doi "https://doi.org/10.1016/0040-6090(95)08157-7" @default.
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