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- W2060217810 abstract "The introduction by ion bombardment of atomic species (“impurities”) into a substrate can be performed in direct (or ion implantation) and indirect modes. The indirect or recoil implantation mode involves generating an impurity layer on top of the substrate, and bombarding the sample with some energetic ions. In the dynamic recoil-mixing mode one compensates, via simultaneous deposition of impurity atoms, the erosion of the surface layer by sputtering. We shall analyze the static and dynamic recoil-mixing modes with a theoretical formalism that describes the impurity and matrix concentration depth-profile evolution with bombarding ion fluence, accounting for atomic mixing, surface erosion, surface-barrier effects and matrix relaxation. The potentiality of the theoretical approach to obtain detailed recoil-mixing profiles and yields will be shown." @default.
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- W2060217810 date "1991-04-01" @default.
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- W2060217810 title "Transport-theoretical studies of static and dynamic recoil mixing" @default.
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- W2060217810 doi "https://doi.org/10.1016/0168-583x(91)96257-l" @default.
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