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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060240906> ?p ?o ?g. }

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• W2060240906 abstract "Abstract Evaporated thin films generally have many defects, and properties inferior to bulk materials. Low-energy ion bombardment during deposition provides surface cleaning, improved nucleation and growth, and in situ annealing. Mechanisms, equipment, procedures, and applications are described for ion-assisted deposition (IAD) and ion-beam cleaning (IBC)." @default.
• W2060240906 created "2016-06-24" @default.
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• W2060240906 date "1989-02-01" @default.
• W2060240906 modified "2023-10-01" @default.
• W2060240906 title "Review of ion-assisted deposition: Research to production" @default.
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• W2060240906 doi "https://doi.org/10.1016/0168-583x(89)90299-1" @default.
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