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- W2060265024 startingPage "1290" @default.
- W2060265024 abstract "Heterodyne laser Michelson interferometry is widely used in precision length measurement but the accuracy is often limited by the unknown size of the periodic non-linearity due to imperfect separation of the two optical frequencies. A method for measuring this non-linearity with an accuracy of about 0.15 nm using pressure scanning of the interferometer is described and results are given for three configurations of a commercial measuring system." @default.
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- W2060265024 date "1987-10-01" @default.
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- W2060265024 title "Non-linearity in length measurement using heterodyne laser Michelson interferometry" @default.
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- W2060265024 doi "https://doi.org/10.1088/0022-3735/20/10/034" @default.
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