Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060268723> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W2060268723 endingPage "114" @default.
- W2060268723 startingPage "107" @default.
- W2060268723 abstract "The corrections on the beam distortion and proximity effect in the electron-beam lithography are discussed from the viewpoint of computer processing. The coefficient parameters of the beam-deflection-distortion mapping function are estimated by the least square method from the measurement data of the beam deflection distortion, and the error distribution is clarified. The measurement errors in the movement and rotation of the sample desk are minimized. For the proximity effect correction at the rectangular beam illumination, the illumination intensity distribution function is approximated to the trapezoidal form and the computer simulation is made for the calculation of the exposure dose. Finally, the dependences of the beam scanning direction and the scanning interval on the proximity effect are examined by computer simulation." @default.
- W2060268723 created "2016-06-24" @default.
- W2060268723 creator A5043537939 @default.
- W2060268723 date "1980-09-01" @default.
- W2060268723 modified "2023-09-25" @default.
- W2060268723 title "Consideration on fine-patterning techniques in eb lithography" @default.
- W2060268723 cites W1996900454 @default.
- W2060268723 cites W2104196496 @default.
- W2060268723 cites W2169863575 @default.
- W2060268723 doi "https://doi.org/10.1002/ecja.4400630914" @default.
- W2060268723 hasPublicationYear "1980" @default.
- W2060268723 type Work @default.
- W2060268723 sameAs 2060268723 @default.
- W2060268723 citedByCount "0" @default.
- W2060268723 crossrefType "journal-article" @default.
- W2060268723 hasAuthorship W2060268723A5043537939 @default.
- W2060268723 hasConcept C120665830 @default.
- W2060268723 hasConcept C121332964 @default.
- W2060268723 hasConcept C126780896 @default.
- W2060268723 hasConcept C159985019 @default.
- W2060268723 hasConcept C168834538 @default.
- W2060268723 hasConcept C192562407 @default.
- W2060268723 hasConcept C194257627 @default.
- W2060268723 hasConcept C200274948 @default.
- W2060268723 hasConcept C204223013 @default.
- W2060268723 hasConcept C2779227376 @default.
- W2060268723 hasConcept C2781355719 @default.
- W2060268723 hasConcept C46362747 @default.
- W2060268723 hasConcept C49040817 @default.
- W2060268723 hasConcept C53524968 @default.
- W2060268723 hasConceptScore W2060268723C120665830 @default.
- W2060268723 hasConceptScore W2060268723C121332964 @default.
- W2060268723 hasConceptScore W2060268723C126780896 @default.
- W2060268723 hasConceptScore W2060268723C159985019 @default.
- W2060268723 hasConceptScore W2060268723C168834538 @default.
- W2060268723 hasConceptScore W2060268723C192562407 @default.
- W2060268723 hasConceptScore W2060268723C194257627 @default.
- W2060268723 hasConceptScore W2060268723C200274948 @default.
- W2060268723 hasConceptScore W2060268723C204223013 @default.
- W2060268723 hasConceptScore W2060268723C2779227376 @default.
- W2060268723 hasConceptScore W2060268723C2781355719 @default.
- W2060268723 hasConceptScore W2060268723C46362747 @default.
- W2060268723 hasConceptScore W2060268723C49040817 @default.
- W2060268723 hasConceptScore W2060268723C53524968 @default.
- W2060268723 hasIssue "9" @default.
- W2060268723 hasLocation W20602687231 @default.
- W2060268723 hasOpenAccess W2060268723 @default.
- W2060268723 hasPrimaryLocation W20602687231 @default.
- W2060268723 hasRelatedWork W1967732612 @default.
- W2060268723 hasRelatedWork W1976433742 @default.
- W2060268723 hasRelatedWork W1983701459 @default.
- W2060268723 hasRelatedWork W2044754982 @default.
- W2060268723 hasRelatedWork W2045370251 @default.
- W2060268723 hasRelatedWork W2069424371 @default.
- W2060268723 hasRelatedWork W2099090892 @default.
- W2060268723 hasRelatedWork W2360981193 @default.
- W2060268723 hasRelatedWork W3098945820 @default.
- W2060268723 hasRelatedWork W4249668346 @default.
- W2060268723 hasVolume "63" @default.
- W2060268723 isParatext "false" @default.
- W2060268723 isRetracted "false" @default.
- W2060268723 magId "2060268723" @default.
- W2060268723 workType "article" @default.