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- W2060291268 abstract "MEMS devices, Micro Electro-Mechanical Systems, are electrical and mechanical systems with characteristic dimensions on the order of microns. Since these systems have moving mechanical parts, characterization of their dynamics, including their modal parameters, is highly desirable. This paper describes the validation of an existing implementation of the Stochastic Subspace Identification (SSI) algorithm, called MACEC, for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). The modal parameters found using MACEC matched well those predicted by theory, thus validating this combination for experimental modal analysis of MEMS structures." @default.
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- W2060291268 date "2011-11-01" @default.
- W2060291268 modified "2023-09-25" @default.
- W2060291268 title "Experimental Modal Characterization of MEMS Switches" @default.
- W2060291268 cites W2098530728 @default.
- W2060291268 doi "https://doi.org/10.4028/www.scientific.net/amr.403-408.4598" @default.
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