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- W2060291338 abstract "A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth." @default.
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- W2060291338 date "1992-01-01" @default.
- W2060291338 modified "2023-09-24" @default.
- W2060291338 title "Quantitative Electron Probe Microanalysis of Multi-layer Structures" @default.
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- W2060291338 doi "https://doi.org/10.1007/978-3-7091-6679-6_6" @default.
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