Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060312985> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2060312985 abstract "We have found that the performance of the t-BOC/onium salt resist system is severely degraded by vapor from organic bases. This effect is very pronounced and can be observed when the coated wafers stand for 15 minutes in air containing as little as 15 parts per billion (ppb) of an organic base. The observed effect, caused by this chemical contamination, depends on the tone of the resist system. For negative tone systems the UV exposure dose, required to obtain the correct linewidth, increases. While for the positive tone system, one observes the generation of a skin at the resist-air interface. Both effects are caused by the photogenerated acid being neutralized by the airborne organic base. There are a wide variety of commonly used materials which can liberate trace amounts of volatile amines and degrade resist performance. For example, fresh paint on a laboratory wall can exhibit this detrimental effect. These effects can be minimized by storing and processing the resist coated wafers in air that has passed through a specially designed, high efficiency carbon filter. The implementation of localized air filtration, to bathe the resist in chemically pure air, enabled this resist system to operate in a manufacturing environment at a rate of 100 wafers/hour." @default.
- W2060312985 created "2016-06-24" @default.
- W2060312985 creator A5007757524 @default.
- W2060312985 creator A5009564795 @default.
- W2060312985 creator A5022459987 @default.
- W2060312985 creator A5024918919 @default.
- W2060312985 creator A5027381116 @default.
- W2060312985 creator A5028257239 @default.
- W2060312985 creator A5068818684 @default.
- W2060312985 creator A5082927789 @default.
- W2060312985 creator A5086643385 @default.
- W2060312985 creator A5087324447 @default.
- W2060312985 creator A5088347174 @default.
- W2060312985 date "1991-06-01" @default.
- W2060312985 modified "2023-10-17" @default.
- W2060312985 title "<title>Airborne chemical contamination of a chemically amplified resist</title>" @default.
- W2060312985 doi "https://doi.org/10.1117/12.46354" @default.
- W2060312985 hasPublicationYear "1991" @default.
- W2060312985 type Work @default.
- W2060312985 sameAs 2060312985 @default.
- W2060312985 citedByCount "79" @default.
- W2060312985 countsByYear W20603129852013 @default.
- W2060312985 countsByYear W20603129852014 @default.
- W2060312985 countsByYear W20603129852015 @default.
- W2060312985 countsByYear W20603129852016 @default.
- W2060312985 countsByYear W20603129852017 @default.
- W2060312985 countsByYear W20603129852018 @default.
- W2060312985 countsByYear W20603129852022 @default.
- W2060312985 countsByYear W20603129852023 @default.
- W2060312985 crossrefType "proceedings-article" @default.
- W2060312985 hasAuthorship W2060312985A5007757524 @default.
- W2060312985 hasAuthorship W2060312985A5009564795 @default.
- W2060312985 hasAuthorship W2060312985A5022459987 @default.
- W2060312985 hasAuthorship W2060312985A5024918919 @default.
- W2060312985 hasAuthorship W2060312985A5027381116 @default.
- W2060312985 hasAuthorship W2060312985A5028257239 @default.
- W2060312985 hasAuthorship W2060312985A5068818684 @default.
- W2060312985 hasAuthorship W2060312985A5082927789 @default.
- W2060312985 hasAuthorship W2060312985A5086643385 @default.
- W2060312985 hasAuthorship W2060312985A5087324447 @default.
- W2060312985 hasAuthorship W2060312985A5088347174 @default.
- W2060312985 hasConcept C112570922 @default.
- W2060312985 hasConcept C120665830 @default.
- W2060312985 hasConcept C121332964 @default.
- W2060312985 hasConcept C142181693 @default.
- W2060312985 hasConcept C160671074 @default.
- W2060312985 hasConcept C171250308 @default.
- W2060312985 hasConcept C18903297 @default.
- W2060312985 hasConcept C192562407 @default.
- W2060312985 hasConcept C2779227376 @default.
- W2060312985 hasConcept C49040817 @default.
- W2060312985 hasConcept C520434653 @default.
- W2060312985 hasConcept C53524968 @default.
- W2060312985 hasConcept C86803240 @default.
- W2060312985 hasConceptScore W2060312985C112570922 @default.
- W2060312985 hasConceptScore W2060312985C120665830 @default.
- W2060312985 hasConceptScore W2060312985C121332964 @default.
- W2060312985 hasConceptScore W2060312985C142181693 @default.
- W2060312985 hasConceptScore W2060312985C160671074 @default.
- W2060312985 hasConceptScore W2060312985C171250308 @default.
- W2060312985 hasConceptScore W2060312985C18903297 @default.
- W2060312985 hasConceptScore W2060312985C192562407 @default.
- W2060312985 hasConceptScore W2060312985C2779227376 @default.
- W2060312985 hasConceptScore W2060312985C49040817 @default.
- W2060312985 hasConceptScore W2060312985C520434653 @default.
- W2060312985 hasConceptScore W2060312985C53524968 @default.
- W2060312985 hasConceptScore W2060312985C86803240 @default.
- W2060312985 hasLocation W20603129851 @default.
- W2060312985 hasOpenAccess W2060312985 @default.
- W2060312985 hasPrimaryLocation W20603129851 @default.
- W2060312985 hasRelatedWork W1974253895 @default.
- W2060312985 hasRelatedWork W2004658011 @default.
- W2060312985 hasRelatedWork W2005480629 @default.
- W2060312985 hasRelatedWork W2022466623 @default.
- W2060312985 hasRelatedWork W2054796528 @default.
- W2060312985 hasRelatedWork W2074528267 @default.
- W2060312985 hasRelatedWork W2081152130 @default.
- W2060312985 hasRelatedWork W2097868149 @default.
- W2060312985 hasRelatedWork W2647262206 @default.
- W2060312985 hasRelatedWork W4386552230 @default.
- W2060312985 isParatext "false" @default.
- W2060312985 isRetracted "false" @default.
- W2060312985 magId "2060312985" @default.
- W2060312985 workType "article" @default.