Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060372267> ?p ?o ?g. }
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82
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- W2060372267 endingPage "389" @default.
- W2060372267 startingPage "383" @default.
- W2060372267 abstract "Electron beam evaporation is used to coat a p-type silicon substrate with a thin layer of tungsten and then with alternating layers of silicon and tungsten. Bombardment of the coated substrate with As+ ions causes intermixing of the metal and silicon layers, dispersion of contaminant atoms at the interface between the first metal layer and the substrate, and implantation of arsenic atoms in the substrate. Subsequent thermal annealing produces a shallow silicide-silicon ohmic contact and simultaneously activates the implanted arsenic donors to form a shallow pn+ junction. This technique has been used for the fabrication of mesa diodes with good junction characteristics. A simplified version, in which only a single tungsten layer is deposited on the substrate, has been used as a self-aligned process in the fabrication of metal/oxide/semiconductor field effect transistors with a polycide gate. In the transistors the silicide contacts to the source and drain regions can be made very close to the gate, reducing both the series resistance of these regions and the overall device size." @default.
- W2060372267 created "2016-06-24" @default.
- W2060372267 creator A5018861794 @default.
- W2060372267 creator A5056697115 @default.
- W2060372267 date "1983-06-01" @default.
- W2060372267 modified "2023-09-25" @default.
- W2060372267 title "Ion implantation technique for simulatneous formation of a shallow silicon p-n junction and a shallow silicide-silicon ohmic contact" @default.
- W2060372267 cites W1983722298 @default.
- W2060372267 cites W2016139757 @default.
- W2060372267 cites W2016950447 @default.
- W2060372267 cites W2032609421 @default.
- W2060372267 cites W2034908695 @default.
- W2060372267 cites W2048698845 @default.
- W2060372267 cites W2084469462 @default.
- W2060372267 cites W2094977171 @default.
- W2060372267 cites W2132566966 @default.
- W2060372267 cites W2159709946 @default.
- W2060372267 doi "https://doi.org/10.1016/0040-6090(83)90580-1" @default.
- W2060372267 hasPublicationYear "1983" @default.
- W2060372267 type Work @default.
- W2060372267 sameAs 2060372267 @default.
- W2060372267 citedByCount "13" @default.
- W2060372267 crossrefType "journal-article" @default.
- W2060372267 hasAuthorship W2060372267A5018861794 @default.
- W2060372267 hasAuthorship W2060372267A5056697115 @default.
- W2060372267 hasConcept C111368507 @default.
- W2060372267 hasConcept C123671423 @default.
- W2060372267 hasConcept C127313418 @default.
- W2060372267 hasConcept C138230450 @default.
- W2060372267 hasConcept C145148216 @default.
- W2060372267 hasConcept C171250308 @default.
- W2060372267 hasConcept C178790620 @default.
- W2060372267 hasConcept C185592680 @default.
- W2060372267 hasConcept C191897082 @default.
- W2060372267 hasConcept C192562407 @default.
- W2060372267 hasConcept C2777289219 @default.
- W2060372267 hasConcept C2777855556 @default.
- W2060372267 hasConcept C2779227376 @default.
- W2060372267 hasConcept C2780901251 @default.
- W2060372267 hasConcept C41823505 @default.
- W2060372267 hasConcept C49040817 @default.
- W2060372267 hasConcept C542268612 @default.
- W2060372267 hasConcept C544956773 @default.
- W2060372267 hasConceptScore W2060372267C111368507 @default.
- W2060372267 hasConceptScore W2060372267C123671423 @default.
- W2060372267 hasConceptScore W2060372267C127313418 @default.
- W2060372267 hasConceptScore W2060372267C138230450 @default.
- W2060372267 hasConceptScore W2060372267C145148216 @default.
- W2060372267 hasConceptScore W2060372267C171250308 @default.
- W2060372267 hasConceptScore W2060372267C178790620 @default.
- W2060372267 hasConceptScore W2060372267C185592680 @default.
- W2060372267 hasConceptScore W2060372267C191897082 @default.
- W2060372267 hasConceptScore W2060372267C192562407 @default.
- W2060372267 hasConceptScore W2060372267C2777289219 @default.
- W2060372267 hasConceptScore W2060372267C2777855556 @default.
- W2060372267 hasConceptScore W2060372267C2779227376 @default.
- W2060372267 hasConceptScore W2060372267C2780901251 @default.
- W2060372267 hasConceptScore W2060372267C41823505 @default.
- W2060372267 hasConceptScore W2060372267C49040817 @default.
- W2060372267 hasConceptScore W2060372267C542268612 @default.
- W2060372267 hasConceptScore W2060372267C544956773 @default.
- W2060372267 hasIssue "3-4" @default.
- W2060372267 hasLocation W20603722671 @default.
- W2060372267 hasOpenAccess W2060372267 @default.
- W2060372267 hasPrimaryLocation W20603722671 @default.
- W2060372267 hasRelatedWork W1981010525 @default.
- W2060372267 hasRelatedWork W2001715206 @default.
- W2060372267 hasRelatedWork W2003926115 @default.
- W2060372267 hasRelatedWork W2010480384 @default.
- W2060372267 hasRelatedWork W2037744230 @default.
- W2060372267 hasRelatedWork W2056784416 @default.
- W2060372267 hasRelatedWork W2060372267 @default.
- W2060372267 hasRelatedWork W2097757685 @default.
- W2060372267 hasRelatedWork W2149718872 @default.
- W2060372267 hasRelatedWork W2981654933 @default.
- W2060372267 hasVolume "104" @default.
- W2060372267 isParatext "false" @default.
- W2060372267 isRetracted "false" @default.
- W2060372267 magId "2060372267" @default.
- W2060372267 workType "article" @default.