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- W2060379420 endingPage "125006" @default.
- W2060379420 startingPage "125006" @default.
- W2060379420 abstract "Electrostatic microactuators are used extensively in MEMS sensors, RF switches and microfluidic pumps. The high bandwidth operation required by these applications complicates the implementation of feedback controllers. This paper designs, proves stability and simulates a feedforward repetitive controller for an electrostatic microbridge. High residual stress creates tension in the microbridge that dominates bending stiffness so a pinned string model with uniform electrostatic force loading is used for model-based control. The control objective is to force the microbridge displacement to follow prescribed spatial and periodic time trajectories. Viscous damping ensures boundedness of the distributed transverse displacement in response to bounded inputs. The average displacement is measured by capacitive sensing and processed offline using a repetitive control algorithm that updates a high speed waveform generator's parameters. Simulations show that the performance depends on the amount of damping. With less than 1% damping in a representative microbridge structure, repetitive control reduces the midspan displacement overshoot by 83%." @default.
- W2060379420 created "2016-06-24" @default.
- W2060379420 creator A5043878831 @default.
- W2060379420 creator A5066633533 @default.
- W2060379420 date "2010-10-22" @default.
- W2060379420 modified "2023-09-25" @default.
- W2060379420 title "Repetitive control of an electrostatic microbridge actuator: theory and simulation" @default.
- W2060379420 cites W1987383189 @default.
- W2060379420 cites W2036777541 @default.
- W2060379420 cites W2038062258 @default.
- W2060379420 cites W2040544492 @default.
- W2060379420 cites W2040849426 @default.
- W2060379420 cites W2068042466 @default.
- W2060379420 cites W2075194128 @default.
- W2060379420 cites W2103720310 @default.
- W2060379420 cites W2106965855 @default.
- W2060379420 cites W2113762663 @default.
- W2060379420 cites W2117782033 @default.
- W2060379420 cites W2120904018 @default.
- W2060379420 cites W2125950824 @default.
- W2060379420 cites W2127824985 @default.
- W2060379420 cites W2136598296 @default.
- W2060379420 cites W2147239478 @default.
- W2060379420 cites W2150233226 @default.
- W2060379420 cites W2154050130 @default.
- W2060379420 cites W2156014908 @default.
- W2060379420 cites W2156285590 @default.
- W2060379420 cites W2167876600 @default.
- W2060379420 cites W2500685921 @default.
- W2060379420 cites W2621919695 @default.
- W2060379420 cites W2946723398 @default.
- W2060379420 cites W4376848482 @default.
- W2060379420 doi "https://doi.org/10.1088/0964-1726/19/12/125006" @default.
- W2060379420 hasPublicationYear "2010" @default.
- W2060379420 type Work @default.
- W2060379420 sameAs 2060379420 @default.
- W2060379420 citedByCount "0" @default.
- W2060379420 crossrefType "journal-article" @default.
- W2060379420 hasAuthorship W2060379420A5043878831 @default.
- W2060379420 hasAuthorship W2060379420A5066633533 @default.
- W2060379420 hasConcept C119599485 @default.
- W2060379420 hasConcept C121332964 @default.
- W2060379420 hasConcept C127413603 @default.
- W2060379420 hasConcept C133731056 @default.
- W2060379420 hasConcept C154945302 @default.
- W2060379420 hasConcept C172707124 @default.
- W2060379420 hasConcept C17500928 @default.
- W2060379420 hasConcept C192562407 @default.
- W2060379420 hasConcept C2775924081 @default.
- W2060379420 hasConcept C2780842517 @default.
- W2060379420 hasConcept C41008148 @default.
- W2060379420 hasConcept C47446073 @default.
- W2060379420 hasConcept C78519656 @default.
- W2060379420 hasConceptScore W2060379420C119599485 @default.
- W2060379420 hasConceptScore W2060379420C121332964 @default.
- W2060379420 hasConceptScore W2060379420C127413603 @default.
- W2060379420 hasConceptScore W2060379420C133731056 @default.
- W2060379420 hasConceptScore W2060379420C154945302 @default.
- W2060379420 hasConceptScore W2060379420C172707124 @default.
- W2060379420 hasConceptScore W2060379420C17500928 @default.
- W2060379420 hasConceptScore W2060379420C192562407 @default.
- W2060379420 hasConceptScore W2060379420C2775924081 @default.
- W2060379420 hasConceptScore W2060379420C2780842517 @default.
- W2060379420 hasConceptScore W2060379420C41008148 @default.
- W2060379420 hasConceptScore W2060379420C47446073 @default.
- W2060379420 hasConceptScore W2060379420C78519656 @default.
- W2060379420 hasIssue "12" @default.
- W2060379420 hasLocation W20603794201 @default.
- W2060379420 hasOpenAccess W2060379420 @default.
- W2060379420 hasPrimaryLocation W20603794201 @default.
- W2060379420 hasRelatedWork W1522672041 @default.
- W2060379420 hasRelatedWork W2008072799 @default.
- W2060379420 hasRelatedWork W2066488219 @default.
- W2060379420 hasRelatedWork W2090301054 @default.
- W2060379420 hasRelatedWork W2097622205 @default.
- W2060379420 hasRelatedWork W2118033540 @default.
- W2060379420 hasRelatedWork W2333000837 @default.
- W2060379420 hasRelatedWork W2387048957 @default.
- W2060379420 hasRelatedWork W2612501290 @default.
- W2060379420 hasRelatedWork W2899084033 @default.
- W2060379420 hasVolume "19" @default.
- W2060379420 isParatext "false" @default.
- W2060379420 isRetracted "false" @default.
- W2060379420 magId "2060379420" @default.
- W2060379420 workType "article" @default.