FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060489912> ?p ?o ?g. }

• W2060489912 endingPage "2381" @default.
• W2060489912 startingPage "2370" @default.
• W2060489912 abstract "The channel fluorine implantation (CFI) process was integrated with the Si3N4 contact etch stop layer (SiN CESL) uniaxial-strained n-channel metal-oxide-semiconductor field-effect transistor (nMOSFET) with the hafnium oxide/silicon oxynitride (HfO2/SiON) gate stack. The SiN CESL process clearly improves basic electrical performance, due to induced uniaxial tensile strain within the channel. However, further integrating of the CFI process with the SiN CESL-strained nMOSFET exhibits nearly identical transconductance, subthreshold swing, drain current, gate leakage and breakdown voltage, which indicates that the strain effect is not affected by the fluorine incorporation. Moreover, hydrogen will diffuse toward the interface during the SiN deposition, then passivate dangling bonds to form weak Si-H bonds, which is detrimental for channel hot electron stress (CHES). Before hydrogen diffusion, fluorine can be used to terminate oxygen vacancies and dangling bonds, which can create stronger Hf-F and Si-F bonds to resist consequent stress. Accordingly, the reliability of constant voltage stress (CVS) and CHES for the SiN CESL uniaxial-strained nMOSFET can be further improved by the fluorinated HfO2/SiON using the CFI process. Nevertheless, the nMOSFET with either the SiN CESL or CFI process exhibits less charge detrapping, which means that a greater part of stress-induced charges would remain in the gate stack after nitrogen (SiN CESL) or fluorine (CFI) incorporation." @default.
• W2060489912 created "2016-06-24" @default.
• W2060489912 creator A5060270122 @default.
• W2060489912 date "2014-03-20" @default.
• W2060489912 modified "2023-10-07" @default.
• W2060489912 title "Electrical Characteristics of the Uniaxial-Strained nMOSFET with a Fluorinated HfO2/SiON Gate Stack" @default.
• W2060489912 cites W1481199830 @default.
• W2060489912 cites W1802765991 @default.
• W2060489912 cites W1980326990 @default.
• W2060489912 cites W1997197098 @default.
• W2060489912 cites W1998453847 @default.
• W2060489912 cites W2000904597 @default.
• W2060489912 cites W2003645630 @default.
• W2060489912 cites W2006966803 @default.
• W2060489912 cites W2009515516 @default.
• W2060489912 cites W2021976485 @default.
• W2060489912 cites W2022292172 @default.
• W2060489912 cites W2025963129 @default.
• W2060489912 cites W2027346712 @default.
• W2060489912 cites W2030787537 @default.
• W2060489912 cites W2035406457 @default.
• W2060489912 cites W2055109641 @default.
• W2060489912 cites W2077923865 @default.
• W2060489912 cites W2079971677 @default.
• W2060489912 cites W2089667642 @default.
• W2060489912 cites W2105990677 @default.
• W2060489912 cites W2112711455 @default.
• W2060489912 cites W2124192045 @default.
• W2060489912 cites W2126132231 @default.
• W2060489912 cites W2135184686 @default.
• W2060489912 cites W2143855218 @default.
• W2060489912 cites W2144831637 @default.
• W2060489912 cites W2151448073 @default.
• W2060489912 cites W2152287093 @default.
• W2060489912 cites W2152664452 @default.
• W2060489912 cites W2161502698 @default.
• W2060489912 doi "https://doi.org/10.3390/ma7032370" @default.
• W2060489912 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/5453296" @default.
• W2060489912 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28788572" @default.
• W2060489912 hasPublicationYear "2014" @default.
• W2060489912 type Work @default.
• W2060489912 sameAs 2060489912 @default.
• W2060489912 citedByCount "5" @default.
• W2060489912 countsByYear W20604899122015 @default.
• W2060489912 countsByYear W20604899122017 @default.
• W2060489912 countsByYear W20604899122022 @default.
• W2060489912 countsByYear W20604899122023 @default.
• W2060489912 crossrefType "journal-article" @default.
• W2060489912 hasAuthorship W2060489912A5060270122 @default.
• W2060489912 hasBestOaLocation W20604899121 @default.
• W2060489912 hasConcept C119599485 @default.
• W2060489912 hasConcept C127413603 @default.
• W2060489912 hasConcept C145598152 @default.
• W2060489912 hasConcept C165801399 @default.
• W2060489912 hasConcept C171250308 @default.
• W2060489912 hasConcept C172385210 @default.
• W2060489912 hasConcept C192562407 @default.
• W2060489912 hasConcept C195370968 @default.
• W2060489912 hasConcept C2779227376 @default.
• W2060489912 hasConcept C2779283907 @default.
• W2060489912 hasConcept C32424582 @default.
• W2060489912 hasConcept C33574316 @default.
• W2060489912 hasConcept C49040817 @default.
• W2060489912 hasConcept C544956773 @default.
• W2060489912 hasConceptScore W2060489912C119599485 @default.
• W2060489912 hasConceptScore W2060489912C127413603 @default.
• W2060489912 hasConceptScore W2060489912C145598152 @default.
• W2060489912 hasConceptScore W2060489912C165801399 @default.
• W2060489912 hasConceptScore W2060489912C171250308 @default.
• W2060489912 hasConceptScore W2060489912C172385210 @default.
• W2060489912 hasConceptScore W2060489912C192562407 @default.
• W2060489912 hasConceptScore W2060489912C195370968 @default.
• W2060489912 hasConceptScore W2060489912C2779227376 @default.
• W2060489912 hasConceptScore W2060489912C2779283907 @default.
• W2060489912 hasConceptScore W2060489912C32424582 @default.
• W2060489912 hasConceptScore W2060489912C33574316 @default.
• W2060489912 hasConceptScore W2060489912C49040817 @default.
• W2060489912 hasConceptScore W2060489912C544956773 @default.
• W2060489912 hasIssue "3" @default.
• W2060489912 hasLocation W20604899121 @default.
• W2060489912 hasLocation W20604899122 @default.
• W2060489912 hasLocation W20604899123 @default.
• W2060489912 hasLocation W20604899124 @default.
• W2060489912 hasOpenAccess W2060489912 @default.
• W2060489912 hasPrimaryLocation W20604899121 @default.
• W2060489912 hasRelatedWork W144548339 @default.
• W2060489912 hasRelatedWork W1643924019 @default.
• W2060489912 hasRelatedWork W1650660448 @default.
• W2060489912 hasRelatedWork W1911586375 @default.
• W2060489912 hasRelatedWork W1985440012 @default.
• W2060489912 hasRelatedWork W2019234249 @default.
• W2060489912 hasRelatedWork W2046109069 @default.
• W2060489912 hasRelatedWork W2097247147 @default.
• W2060489912 hasRelatedWork W2168438143 @default.
• W2060489912 hasRelatedWork W4286209059 @default.
• W2060489912 hasVolume "7" @default.
• W2060489912 isParatext "false" @default.
• W2060489912 isRetracted "false" @default.

• next