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• W2060548356 endingPage "11954" @default.
• W2060548356 startingPage "11949" @default.
• W2060548356 abstract "There are many possible factors in semiconductor manufacturing processes such as metrology tool bias, product type, or chamber that may induce disturbance to the process output. To account for all these types, a context-based model is often used. The most important feature of a context-based system is rank deficiency, and therefore we propose a method that unbiasedly estimates the relative status of each context and process output by state transformation. The transformed states are straightforward and physically meaningful. Furthermore, a solution of planning paths with a guarantee of output performance is also investigated. The other application of particle count estimation for data from a real fab is also demonstrated." @default.
• W2060548356 created "2016-06-24" @default.
• W2060548356 creator A5011490291 @default.
• W2060548356 creator A5036169571 @default.
• W2060548356 creator A5036482011 @default.
• W2060548356 creator A5036962054 @default.
• W2060548356 creator A5042723052 @default.
• W2060548356 creator A5047746264 @default.
• W2060548356 creator A5082043244 @default.
• W2060548356 date "2008-01-01" @default.
• W2060548356 modified "2023-10-02" @default.
• W2060548356 title "Context-based State Estimation in Semiconductor Manufacturing: Reference Path Based State Transformation Approach" @default.
• W2060548356 cites W1964615528 @default.
• W2060548356 cites W2099754468 @default.
• W2060548356 cites W2130621851 @default.
• W2060548356 cites W2134288761 @default.
• W2060548356 cites W2159375928 @default.
• W2060548356 cites W589744691 @default.
• W2060548356 doi "https://doi.org/10.3182/20080706-5-kr-1001.02022" @default.
• W2060548356 hasPublicationYear "2008" @default.
• W2060548356 type Work @default.
• W2060548356 sameAs 2060548356 @default.
• W2060548356 citedByCount "3" @default.
• W2060548356 countsByYear W20605483562013 @default.
• W2060548356 countsByYear W20605483562015 @default.
• W2060548356 crossrefType "journal-article" @default.
• W2060548356 hasAuthorship W2060548356A5011490291 @default.
• W2060548356 hasAuthorship W2060548356A5036169571 @default.
• W2060548356 hasAuthorship W2060548356A5036482011 @default.
• W2060548356 hasAuthorship W2060548356A5036962054 @default.
• W2060548356 hasAuthorship W2060548356A5042723052 @default.
• W2060548356 hasAuthorship W2060548356A5047746264 @default.
• W2060548356 hasAuthorship W2060548356A5082043244 @default.
• W2060548356 hasBestOaLocation W20605483561 @default.
• W2060548356 hasConcept C104317684 @default.
• W2060548356 hasConcept C105795698 @default.
• W2060548356 hasConcept C111919701 @default.
• W2060548356 hasConcept C11413529 @default.
• W2060548356 hasConcept C114614502 @default.
• W2060548356 hasConcept C119599485 @default.
• W2060548356 hasConcept C124101348 @default.
• W2060548356 hasConcept C127413603 @default.
• W2060548356 hasConcept C133731056 @default.
• W2060548356 hasConcept C13736549 @default.
• W2060548356 hasConcept C138885662 @default.
• W2060548356 hasConcept C160671074 @default.
• W2060548356 hasConcept C164226766 @default.
• W2060548356 hasConcept C166957645 @default.
• W2060548356 hasConcept C185592680 @default.
• W2060548356 hasConcept C195766429 @default.
• W2060548356 hasConcept C199360897 @default.
• W2060548356 hasConcept C201995342 @default.
• W2060548356 hasConcept C204241405 @default.
• W2060548356 hasConcept C205649164 @default.
• W2060548356 hasConcept C2776401178 @default.
• W2060548356 hasConcept C2777735758 @default.
• W2060548356 hasConcept C2779343474 @default.
• W2060548356 hasConcept C33923547 @default.
• W2060548356 hasConcept C41008148 @default.
• W2060548356 hasConcept C41895202 @default.
• W2060548356 hasConcept C48103436 @default.
• W2060548356 hasConcept C55493867 @default.
• W2060548356 hasConcept C66018809 @default.
• W2060548356 hasConcept C96250715 @default.
• W2060548356 hasConcept C98045186 @default.
• W2060548356 hasConceptScore W2060548356C104317684 @default.
• W2060548356 hasConceptScore W2060548356C105795698 @default.
• W2060548356 hasConceptScore W2060548356C111919701 @default.
• W2060548356 hasConceptScore W2060548356C11413529 @default.
• W2060548356 hasConceptScore W2060548356C114614502 @default.
• W2060548356 hasConceptScore W2060548356C119599485 @default.
• W2060548356 hasConceptScore W2060548356C124101348 @default.
• W2060548356 hasConceptScore W2060548356C127413603 @default.
• W2060548356 hasConceptScore W2060548356C133731056 @default.
• W2060548356 hasConceptScore W2060548356C13736549 @default.
• W2060548356 hasConceptScore W2060548356C138885662 @default.
• W2060548356 hasConceptScore W2060548356C160671074 @default.
• W2060548356 hasConceptScore W2060548356C164226766 @default.
• W2060548356 hasConceptScore W2060548356C166957645 @default.
• W2060548356 hasConceptScore W2060548356C185592680 @default.
• W2060548356 hasConceptScore W2060548356C195766429 @default.
• W2060548356 hasConceptScore W2060548356C199360897 @default.
• W2060548356 hasConceptScore W2060548356C201995342 @default.
• W2060548356 hasConceptScore W2060548356C204241405 @default.
• W2060548356 hasConceptScore W2060548356C205649164 @default.
• W2060548356 hasConceptScore W2060548356C2776401178 @default.
• W2060548356 hasConceptScore W2060548356C2777735758 @default.
• W2060548356 hasConceptScore W2060548356C2779343474 @default.
• W2060548356 hasConceptScore W2060548356C33923547 @default.
• W2060548356 hasConceptScore W2060548356C41008148 @default.
• W2060548356 hasConceptScore W2060548356C41895202 @default.
• W2060548356 hasConceptScore W2060548356C48103436 @default.
• W2060548356 hasConceptScore W2060548356C55493867 @default.
• W2060548356 hasConceptScore W2060548356C66018809 @default.
• W2060548356 hasConceptScore W2060548356C96250715 @default.
• W2060548356 hasConceptScore W2060548356C98045186 @default.
• W2060548356 hasIssue "2" @default.
• W2060548356 hasLocation W20605483561 @default.

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