Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060629825> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2060629825 endingPage "2936" @default.
- W2060629825 startingPage "2930" @default.
- W2060629825 abstract "Imaging ellipsometry is presented as a technique for quantification and visualization of the lateral thickness distribution of thin (0–30 nm) transparent layers on solid substrates. The main advantage of imaging ellipsometry is that every point on a surface is measured at the same time with a high lateral resolution. The method is based on the use of combined null and off‐null ellipsometry at an incident angle close to the pseudo‐Brewster angle of a high index substrate such as silicon. In the present experimental setup, a xenon lamp, a collimator, and a wavelength‐selective filter provide an expanded collimated probe beam with a diameter of 25 mm. Other major components in the system are a polarizer, a compensator, and an analyzer. In this way, a 15×30 mm2 image of a sample surface can be focused onto a charge‐coupled‐device video camera and transferred to a computer for further evaluation by image processing. Thickness measurements are performed for calibration purposes with ordinary null ellipsometry. The imaging ellipsometer has an accuracy of better than 0.5 nm at a lateral resolution of 5 μm in the present configuration, but improvements of at least a factor of 5 can be foreseen. Several aspects of the ellipsometric imaging system are illustrated in selected applications including continuous protein thickness distributions, stepped silicon dioxide thickness distributions, and visualization of protein patterning of surfaces. The latter can be used in a biosensor system as illustrated here by antigen–antibody binding studies." @default.
- W2060629825 created "2016-06-24" @default.
- W2060629825 creator A5017306653 @default.
- W2060629825 creator A5038291065 @default.
- W2060629825 creator A5065533987 @default.
- W2060629825 date "1996-08-01" @default.
- W2060629825 modified "2023-10-13" @default.
- W2060629825 title "Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates" @default.
- W2060629825 cites W1967782218 @default.
- W2060629825 cites W1989106497 @default.
- W2060629825 cites W2001151182 @default.
- W2060629825 cites W2006098717 @default.
- W2060629825 cites W2023121027 @default.
- W2060629825 cites W2027619206 @default.
- W2060629825 cites W2038945493 @default.
- W2060629825 cites W2044240524 @default.
- W2060629825 cites W2048511394 @default.
- W2060629825 cites W2052819726 @default.
- W2060629825 cites W2081448802 @default.
- W2060629825 cites W3022061100 @default.
- W2060629825 doi "https://doi.org/10.1063/1.1147074" @default.
- W2060629825 hasPublicationYear "1996" @default.
- W2060629825 type Work @default.
- W2060629825 sameAs 2060629825 @default.
- W2060629825 citedByCount "184" @default.
- W2060629825 countsByYear W20606298252012 @default.
- W2060629825 countsByYear W20606298252013 @default.
- W2060629825 countsByYear W20606298252014 @default.
- W2060629825 countsByYear W20606298252015 @default.
- W2060629825 countsByYear W20606298252016 @default.
- W2060629825 countsByYear W20606298252017 @default.
- W2060629825 countsByYear W20606298252018 @default.
- W2060629825 countsByYear W20606298252019 @default.
- W2060629825 countsByYear W20606298252020 @default.
- W2060629825 countsByYear W20606298252021 @default.
- W2060629825 countsByYear W20606298252022 @default.
- W2060629825 countsByYear W20606298252023 @default.
- W2060629825 crossrefType "journal-article" @default.
- W2060629825 hasAuthorship W2060629825A5017306653 @default.
- W2060629825 hasAuthorship W2060629825A5038291065 @default.
- W2060629825 hasAuthorship W2060629825A5065533987 @default.
- W2060629825 hasConcept C120665830 @default.
- W2060629825 hasConcept C121332964 @default.
- W2060629825 hasConcept C121524040 @default.
- W2060629825 hasConcept C125743686 @default.
- W2060629825 hasConcept C171250308 @default.
- W2060629825 hasConcept C18293161 @default.
- W2060629825 hasConcept C19067145 @default.
- W2060629825 hasConcept C192562407 @default.
- W2060629825 hasConcept C205372480 @default.
- W2060629825 hasConcept C2779200277 @default.
- W2060629825 hasConcept C34445779 @default.
- W2060629825 hasConcept C42067758 @default.
- W2060629825 hasConcept C49040817 @default.
- W2060629825 hasConcept C520434653 @default.
- W2060629825 hasConcept C544956773 @default.
- W2060629825 hasConceptScore W2060629825C120665830 @default.
- W2060629825 hasConceptScore W2060629825C121332964 @default.
- W2060629825 hasConceptScore W2060629825C121524040 @default.
- W2060629825 hasConceptScore W2060629825C125743686 @default.
- W2060629825 hasConceptScore W2060629825C171250308 @default.
- W2060629825 hasConceptScore W2060629825C18293161 @default.
- W2060629825 hasConceptScore W2060629825C19067145 @default.
- W2060629825 hasConceptScore W2060629825C192562407 @default.
- W2060629825 hasConceptScore W2060629825C205372480 @default.
- W2060629825 hasConceptScore W2060629825C2779200277 @default.
- W2060629825 hasConceptScore W2060629825C34445779 @default.
- W2060629825 hasConceptScore W2060629825C42067758 @default.
- W2060629825 hasConceptScore W2060629825C49040817 @default.
- W2060629825 hasConceptScore W2060629825C520434653 @default.
- W2060629825 hasConceptScore W2060629825C544956773 @default.
- W2060629825 hasIssue "8" @default.
- W2060629825 hasLocation W20606298251 @default.
- W2060629825 hasOpenAccess W2060629825 @default.
- W2060629825 hasPrimaryLocation W20606298251 @default.
- W2060629825 hasRelatedWork W1982595905 @default.
- W2060629825 hasRelatedWork W1982965274 @default.
- W2060629825 hasRelatedWork W1995216939 @default.
- W2060629825 hasRelatedWork W2030920086 @default.
- W2060629825 hasRelatedWork W2050027526 @default.
- W2060629825 hasRelatedWork W2111284334 @default.
- W2060629825 hasRelatedWork W2164794324 @default.
- W2060629825 hasRelatedWork W2385498824 @default.
- W2060629825 hasRelatedWork W2767350803 @default.
- W2060629825 hasRelatedWork W2083452641 @default.
- W2060629825 hasVolume "67" @default.
- W2060629825 isParatext "false" @default.
- W2060629825 isRetracted "false" @default.
- W2060629825 magId "2060629825" @default.
- W2060629825 workType "article" @default.